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Vacuum interconnected surface analysis device and using method thereof

A surface analysis and vacuum technology, applied in the field of surface chemistry, can solve problems such as the inability to achieve interconnection and the incompatibility of sample holders, and achieve the effects of reducing background signal interference, facilitating imaging, and facilitating acquisition.

Active Publication Date: 2020-03-20
DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The technical problem of the present invention is to overcome the problem that the existing programmed temperature desorption instrument and the scanning tunneling microscope cannot realize interconnection due to the incompatibility of the sample holder, and provides a method for realizing ultra-high vacuum (- 10 mbar) interconnected surface analysis device and method of use thereof, and sample stage for surface analysis device

Method used

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  • Vacuum interconnected surface analysis device and using method thereof
  • Vacuum interconnected surface analysis device and using method thereof
  • Vacuum interconnected surface analysis device and using method thereof

Examples

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Embodiment 1

[0071] This device can measure the desorption temperature of the lattice oxygen of FeO nano-islands on gold (Au), copper (Cu), platinum (Pt) metal substrates, infer the bond energy of the corresponding Fe-O bond, and study the metal substrate The regulation of bond energy here. This vacuum interconnected temperature programmed desorption device based on ultra-high vacuum conditions is connected with an ultra-high vacuum system.

[0072] Raise the temperature of the Fe evaporation source to a suitable temperature (~1300K) for degassing. The clean substrate sample Pt(111) prepared in the ultra-high vacuum system is directly transferred to the programmed temperature sample stage of the device through the propagating device. Gas valve into high-purity O 2 (99.999%) to 1×10-7mbar, open the baffle of the evaporation source, and deposit a FeO film to a suitable coverage. Then close the evaporation source damper and turn off the oxygen. After the chamber vacuum is restored, the obt...

Embodiment 2

[0074] This device can measure metastable FeO on gold (Au), copper (Cu), platinum (Pt) metal substrates 2 The desorption temperature of the lattice oxygen of the nano-island is used to deduce the bond energy of the corresponding Fe-O bond, and to study the regulation of the metal substrate on the metastable oxide bond energy here.

[0075] FeO / Pt(111) was prepared by the same preparation method as in Example 1. After the cavity vacuum is restored, the obtained thin film sample is fixed on the sample holder, and the sample holder is introduced into the scanning tunneling microscope chamber for structural analysis, and then 0.1mbar O 2 , imaged again to obtain FeO 2 / Pt(111). Then it is transferred to the temperature-programmed clamping plate for desorption experiment. Through the external software, the heating temperature is set to 3K / s, and the temperature is programmed. At the same time, the desorbed gas phase molecular peak with a mass number of 32 is collected, and the co...

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Abstract

The invention relates to a surface analysis device for realizing interconnection under an ultrahigh vacuum condition (2*10<-10> mbar), a use method of the surface analysis device and a sample table for the surface analysis device. The sample table for the surface analysis device comprises (1) a programmed temperature rise clamping plate for bearing a sample support to realize linear controllable temperature rise (3-4K / s) of a sample from a low-temperature end to a high-temperature end (100K-1000K); (2) a variable temperature rod for butting a sample support clamping plate, and cooling the sample table through liquid nitrogen; (3) a sample support suitable for a single crystal sample with the thickness of 0.5-1.5 mm, wherein direct current heating is carried out on the sample, and the sample support is compatible with the requirements of a scanning tunneling microscope imaging sample support; and (4) a high-temperature clamping plate for raising the temperature of a common sample support in a radiation, heating electron beam heating or direct-current heating mode. The surface analysis device is suitable for a vacuum interconnection system of a temperature programming desorption instrument and a scanning tunnel microscope, morphology information of a model catalyst and spectrography and reaction activity information of adsorption molecules are obtained, and association of the structure and activity of the catalyst is achieved on the atomic scale.

Description

technical field [0001] The invention relates to a method for realizing ultra-high vacuum conditions (<2x10 -10 mbar) interconnected surface analysis device and method of use thereof, belonging to the field of surface chemistry. Background technique [0002] The temperature-programmed desorption instrument is an instrument that exposes the sample to be tested to probe molecules under a specific pressure atmosphere at low temperature, and then linearly increases the temperature of the sample through an external program to obtain the sample spectrum information. Due to the different strengths of the bonded probe molecules at different sites on the surface of the model catalyst, the corresponding desorption temperature points are different, and the molecules will desorb at different temperatures and be detected by mass spectrometry, forming a specific desorption peak. In addition, the surface reaction of the model catalyst can be carried out through co-adsorption, and the c...

Claims

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Application Information

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IPC IPC(8): G01Q60/10
CPCG01Q60/10
Inventor 杨帆陈浩董金奎王冰雷包信和
Owner DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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