A series of processing technology for the surface of the liquid-supplying optical element in the center of the seed aperture

Abstract

The invention discloses a series of processing technology for liquid-supply optical surface in the center of sub-aperture. The series of processing technology is a systematic process method from blank surface to ultra-smooth surface based on the principle of hydrodynamic pressure, mainly including the grinding and polishing process of hydrodynamic pressure consolidated abrasive , center liquid supply small grinding head polishing process and disk hydrodynamic pressure polishing process. The sub-aperture central liquid supply optical surface processing tool includes an elastic coupling, a polishing disc, and a polishing pad. The two ends of the flexible coupling are respectively connected to the polishing disc and the rotating shaft. Pads and polishing pads to realize the successive recursive suppression process of optical surface low frequency, medium frequency and high frequency errors. At the same time, in order to obtain a high-quality, low-damage ultra-precision smooth surface, the combined application of different grinding and polishing pads, after the previous process polished the surface, the residual sub-surface damage layer was removed and no new sub-surface damage was formed. Multiple processing minimizes subsurface damage.

Description

technical field [0001] The invention belongs to the field of optical element processing, and is a series of ultra-smooth optical element surface processing technology based on the principle of hydrodynamic pressure, in particular a system technology involving the processing of the optical element surface from the ground surface to the ultra-smooth surface. Background technique [0002] Optical glass is widely used in aerospace, information, energy, chemical industry, microelectronics and other fields due to its high transparency, optical uniformity, and stable chemical properties. With the vigorous development of optical technology and the increasing application of optical materials, higher requirements are placed on the surface quality of optical components. Especially for large-scale optical systems such as high-power laser device systems and micro-electromechanical systems, the requirements for surface quality and processing efficiency of components are extremely strict. ...

AI Technical Summary

Problems solved by technology

Otherwise, its high-frequency and low-frequency errors will cause imaging such as spherical aberration, aberration, and distortion to affect the optical imaging quality, and high-frequency errors will cause energy loss in the application of strong light optical components

The above-mentioned optical glass surface molding methods are mainly aimed at the processing technology and method of the surface of the optical element, but lack the effective control of the error in the entire frequency range from low frequency to high frequency on the surface of large-aperture aspheric optical elements and the ability to suppress surface damage after processing

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