Sensitive resistance pressure sensor chip and processing method thereof
A pressure sensor and sensitive resistor technology, applied in the field of microelectronics, to achieve the effect of good linearity, stable chemical properties and large piezoresistive coefficient
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[0042] Depend on image 3 As shown, 0 in the figure is a single-crystal silicon substrate, and a silicon diaphragm is processed on the single-crystal silicon substrate layer 0, and 7 is a bonding pad area; a diamond sensitive resistor 5 is arranged inside the silicon diaphragm, and the silicon diaphragm A layer of oxide layer 4 for insulation between the diamond sensitive resistor and the substrate is separated from the side wall of the diamond sensitive resistor; the connection layer between the diamond sensitive resistor 5 and the silicon diaphragm is used to isolate the sensitive resistor from the silicon diaphragm Intrinsic Diamond 5. A silicon nitride layer 8 is also covered on the surface of the single crystal silicon substrate.
[0043] A layer of titanium gold electrode 9 for conducting electricity is connected above the diamond sensitive resistor 6 , and the cross-sectional structure at the bonding pad area 7 is consistent with that of the diamond sensitive resistor ...
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