A cylindrical lens, a cylindrical beam splitting lens, a photodetector and a photodetector array

Abstract

An embodiment of the present invention provides a cylindrical lens, a cylindrical beam splitting lens, a photodetector, and a photodetector array. The cylindrical lens includes: a bottom layer, an oxide layer, and a grating layer, and the cylindrical lens is an SOI structure, wherein: the The oxide layer is arranged between the bottom layer and the grating layer; the grating layer is used to phase-modulate the incident parallel light so that the transmitted light converges into a linear spot; the grating layer is composed of various preset Assume that the square grating blocks of the same specification are formed according to the preset arrangement order, wherein the period of each square grating block is the same, the length and width of the square grating blocks of the same preset specification are the same, and the height of each square grating block is the same. The embodiment overcomes the shortcomings of traditional lenticular lenses that are bulky, difficult to prepare and difficult to integrate, and has the advantages of easy design, small size, easy integration, and compatibility with CMOS technology, and is widely used in optical display and optical communication systems, and photodetector arrays realize High power characteristics.

Description

technical field [0001] The invention relates to the technical field of wireless communication over light, in particular to a cylindrical lens, a cylindrical beam splitting lens, a detector and an optical detector array. Background technique [0002] Grating is an important optical component, which is widely used in display, sensing, precision instruments and communication systems. As a new type of micro-nano grating structure, sub-wavelength grating is easy to achieve high reflection characteristics in a wide spectral range. , which is mainly used to replace the distributed Bragg mirror in the vertical cavity surface emitting laser or the mirror in other integrated optical devices. In addition, due to the excellent wavefront phase control characteristics of the subwavelength grating, it can realize the functions of beam deflection, convergence, beam splitting and polarization selection, etc., and is mainly used in imaging devices, filters and couplers, etc. The micro-nano s...

AI Technical Summary

Problems solved by technology

[0003] Although traditional optical components can achieve beam control very well, it is difficult to achieve integration due to their large size. The preparation process of small-sized lenses and other components is complicated and difficult to control. How to reasonably design the structure of sub-wavelength gratings and use them to replace Traditional optical components, such as converging lenses, cylindrical lenses, prisms and high reflection mirrors, etc., and integrate them with photodetectors, lasers, and light modulators to achieve thinning, miniaturization, and integration of optical systems. There is no better way

In addition, in the study of photodetector arrays, fiber array coupling is costly and complex in structure, and is only suitable for circular photodetectors.

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