Biosensor combining terahertz metamaterial and microfluid technology and application of biosensor in detection of liquid-phase biological sample
A biosensor and metamaterial technology, which is applied to biosensors and application fields in liquid-phase biological sample detection, can solve the problems such as the need for breakthrough in detection sensitivity, and achieve fast analysis speed, high application prospects, and low consumption of samples and reagents. Effect
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[0030] The first step: making a terahertz metamaterial biosensing chip
[0031] Deposit a micro-processed gold film SRRs array on a silicon substrate, specific parameters: 1. Substrate silicon wafer material: thickness 500μm, unit area 15mm*15mm; 2. Gold film SRRs array: SRR: thickness 120nm, structure inner diameter 48μm, outer The diameter is 60 μm, the double opening is circular, the opening gap (G) is 3 μm wide, and the double opening angle (θ) is 120 degrees; SRRs array: the distance between the centers of the circles is 90 μm, and the array area is 5*5mm.
[0032] Step 2: Making PDMS Microfluidic Channels
[0033] First, a microfluidic channel mold was prepared on a silicon substrate by SU-8 photoresist lithography process, with a thickness of 50 μm; secondly, a PDMS microfluidic channel was fabricated according to the mold.
[0034] Step Three: Assembling the Micropipes
[0035] Assemble stainless steel and transparent plastic micropipes onto PDMS (micropipe inner dia...
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