Optical detector with superstructure surface coupled with transverse thermoelectric film and manufacturing method

Abstract

The invention discloses an optical detector with a superstructure surface coupled with a transverse thermoelectric film. The transverse thermoelectric film epitaxially grows on the surface of a beveled substrate; a first electrode and a second electrode are respectively arranged at two ends of the surface of the transverse thermoelectric film along the direction of the beveled substrate; an infrared absorber with the superstructure surface is arranged between the first electrode and the second electrode, is coupled with the transverse thermoelectric film and is insulated from the first electrode and the second electrode. The beneficial effects of the invention are that: high-efficiency detection and quick-response detection of mid-infrared light and far-infrared light is achieved; room-temperature detection of mid-infrared light and far-infrared light can be realized; selective detection of infrared light with specific wavelength is realized, selective detection of different polarizedlight is realized, and the optical detector can be applied to a non-dispersive infrared gas sensor. The optical detector is simple in structure, is manufactured through a thin film deposition process,the manufacturing process is compatible with a COMS process, and is easy for large-scale production.

Description

technical field [0001] The invention relates to the field of infrared photodetection devices, in particular to a photodetector with a superstructure surface coupled with a transverse pyroelectric thin film and a manufacturing method thereof. Background technique [0002] The infrared photodetector is a device that converts the incident infrared radiation signal into an electrical signal output. The wavelength of infrared radiation is between visible light and microwave, which is imperceptible to the human eye. The infrared detector converts it into an electrical signal output, which plays an important role in the detection of targets and the acquisition of images, especially at night or in dark environments Among them, infrared detection technology makes it easy to observe and monitor heat-radiating objects, and detect and track maneuvering targets. Therefore, it plays an important role in the fields of daily life and weaponry. [0003] According to different working princ...

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Problems solved by technology

[0006] However, since this photodetector is also based on the principle of light absorption-induced photo-thermal-electric conversion, as long as the photosensitive material absorbs photon energy, a temperature difference will be formed on the upper and lower surfaces of the lateral pyroelectric film, which will induce a thermovoltage response. Therefore, from From ultraviolet light to infrared light, no matter which wavelength of light irradiates the film, a voltage response will be generated. The photodetector has the characteristics of wide spectral response and cannot achieve spectral selective response.

In addition, due to the large penetration depth of mid- and far-infrared light in the photosensitive film, the temperature difference generated by light irradiation on the upper and lower surfaces of the film is small, and the sensitivity of detecting mid- and far-infrared light by using a photodetector based on the transverse pyroelectric effect is not high.

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