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Metamaterial terahertz biosensor and production method thereof

A biosensor, terahertz technology, applied in the field of sensors, can solve the problems of low absorption rate, weakened energy, weakened resonance strength, etc.

Pending Publication Date: 2020-10-23
GUILIN UNIV OF ELECTRONIC TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It can be seen from the above analysis that although the sensor of the invention has a higher detection limit of the refractive index, the absorption peak amplitude is lower and the fluctuation is larger
Due to the strong absorption characteristics of water to terahertz, adding liquid in the fluid channel will weaken the energy of the incident terahertz wave, resulting in the weakening of the resonance intensity formed by the interaction between the sensor and the terahertz wave, and reducing the absorption rate of the absorption peak
However, the sensor described in this invention has a low absorption rate of the absorption peak, and will obtain an absorption peak with a lower absorption rate when used in liquid sensing, which directly affects the detection effect.

Method used

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  • Metamaterial terahertz biosensor and production method thereof
  • Metamaterial terahertz biosensor and production method thereof
  • Metamaterial terahertz biosensor and production method thereof

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preparation example Construction

[0047] The preparation method of the above-mentioned metamaterial terahertz biosensor comprises the following steps:

[0048] 1) Preparation of the top layer module: on the dielectric layer 1, the metal microstructure layer 2 is formed on the dielectric layer 1 through the processes of gluing, exposure, development, coating, and stripping to obtain the top layer module;

[0049] 2) Preparation of the bottom module: Etch on the base layer 5 to form a groove matching the size of the top module, then layer a metal film on the bottom surface of the groove to form a metal reflective layer 4, and finally open a groove on the base layer 5 The liquid inlet 7 and the liquid outlet 6 connected by the groove obtain the bottom module;

[0050] 3) Bonding the top module and the bottom module, forming a microfluidic channel 3 between the metal microstructure layer 2 of the top module and the metal reflection layer 4 of the bottom module, to obtain the metamaterial terahertz biosensor.

[0...

Embodiment 1

[0056] by Figure 1 to Figure 3 The structure diagram shown illustrates the structure and preparation of the sensor of the present invention.

[0057] see Figure 1 to Figure 3 , the metal microstructure layer 2 is 4╳4 units periodically arranged on the dielectric layer 1, and the period of the metal microstructure layer 2 in the X-axis direction and the period in the Y-axis direction are both 120 μm. In the structure of the metal microstructure layer 2, the outer length a of the square metal ring is 108 μm, and the ring width b is 8 μm; the arm length c of the “H” metal ring in the double “H” cross metal structure is 26 μm, and the arm width d is 8 μm, the leaf length e is 40 μm, and the leaf width f is 6 μm.

[0058] The thickness of the base layer 5 is 110 μm, and its material is high resistance silicon; the thickness of the dielectric layer 1 is 6 μm, and its material is polytetrafluoroethylene; the thickness of the metal microstructure layer 2 is 0.2 μm, and its materia...

Embodiment 2

[0074] by Figure 7 The sensor structure unit of the structure shown analyzes the absorption characteristics of the sensor.

[0075] exist Figure 7 In the shown sensor structure unit, the period (Dx) of the metal microstructure layer 2 in the X-axis direction and the period (Dy) in the Y-axis direction are both 120 μm. In the structure of the metal microstructure layer 2, the outer length a of the square metal ring is 108 μm, and the ring width b is 8 μm; the arm length c of the “H” metal ring in the double “H” cross metal structure is 26 μm, and the arm width d is 8 μm, the leaf length e is 40 μm, and the leaf width f is 6 μm. The thickness of the base layer 5 is 110 μm, and its material is high-resistance silicon; the thickness of the dielectric layer 1 is 6 μm, and its material is polytetrafluoroethylene; the thickness of the metal microstructure layer 2 is 0.2 μm, and its material is silver; The reflective layer 4 has a thickness of 0.2 μm and its material is silver; t...

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Abstract

The invention discloses a metamaterial terahertz biosensor and a production method thereof. The metamaterial terahertz biosensor comprises a substrate layer and a dielectric layer. A metal reflectinglayer is arranged on the substrate layer; a metal microstructure layer is arranged on the dielectric layer; a micro-flow channel for a measured liquid to flow through is formed between the metal reflecting layer and the metal microstructure layer; a liquid inlet and a liquid outlet of the micro-flow channel are formed in the substrate layer; and the metal microstructure layer is a periodic structure unit attached to the dielectric layer, the metal microstructure layer is composed of a square metal ring and a double-''H''-shaped crossed metal structure which is arranged in the square metal ringand is concentric with the square metal ring, and the double-''H''-shaped crossed metal structure is composed of two ''H''-shaped metal rings which are completely the same in structure and are vertically crossed. The sensor provided by the invention has an extremely high absorption peak, relatively high sensitivity and polarization insensitivity.

Description

technical field [0001] The invention relates to a sensor, in particular to a metamaterial terahertz biosensor and a preparation method thereof. Background technique [0002] Terahertz (Terahertz, referred to as THz, 1THz = 10 12 Hz) wave is an electromagnetic wave with a frequency in the range of 0.1-10THz (wavelength 30-3000μm). It is in the transition band from macroelectronics to microphotonics. It has unique physical properties such as permeability and good non-destructive detection characteristics. Therefore, terahertz spectroscopy is especially suitable for the detection of biomolecules and cells. Since the terahertz wave has fingerprint spectrum, and the rotation and vibration energy levels of most biomolecules are in the terahertz band, a specific fingerprint absorption peak will be formed in the terahertz band, and this characteristic is used to analyze the characteristic spectrum of biomolecules , can realize its qualitative and quantitative analysis. However, t...

Claims

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Application Information

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IPC IPC(8): G01N21/3586B81B7/04B81C1/00
CPCB81B7/04B81B2201/02B81C1/00031G01N21/3586
Inventor 陈涛黄锋宇张活殷贤华胡放荣许川佩
Owner GUILIN UNIV OF ELECTRONIC TECH
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