Super-lubricity performance metal/hydrogen-containing carbon composite thin film and preparation method thereof

A metal thin film and carbon composite technology, applied in the field of solid lubrication and tribology, can solve problems such as high environmental dependence, difficult engineering application, and harsh super-slip conditions

Active Publication Date: 2020-10-30
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Later, the ultra-smoothness of double-walled carbon nanotubes was discovered ( Nature Nanotechnology, 2013, 8(12):912-916 ), Zheng Quanshui and Wei Fei et al. further researched, using centimeter-scale carbon nanotubes to expand the super-lubricating scale from the micron scale to the centimeter scale ( Nano Lett.20161621367- 1374; Phys. Rev. Lett. 97, 0

Method used

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  • Super-lubricity performance metal/hydrogen-containing carbon composite thin film and preparation method thereof
  • Super-lubricity performance metal/hydrogen-containing carbon composite thin film and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] (1) Clean the stainless steel substrate in an ultrasonic cleaning tank with a water-based cleaning solution and a hydrocarbon cleaning solution to remove oil stains, rust spots and pollutants, then dry it with nitrogen and place it into the coating vacuum chamber;

[0027] (2) Pump the vacuum system to 2.0×10 through mechanical pump, Roots pump and molecular pump in turn -3 Pa and below, turn on the hollow cathode ion source, adjust the current to 400A, and the bias voltage of 500; pass in argon, keep the pressure at 1Pa, bombard and clean for 200 minutes to further remove the substrate surface contaminants;

[0028] (3) Turn on the magnetron sputtering target (the target is Cr metal), adjust the peak current to 200A, bias 300 V, adjust the argon to 0.5Pa, and deposit for 20 minutes; pass in 15% nitrogen and 35% methane ( Compared with argon gas phase), adjust current 15A, bias voltage 300V, argon gas adjusted to 0.5, and deposit for 40 minutes to obtain a metal carbonitride ...

Embodiment 2

[0033] (1) Clean the mold steel substrate with water-based cleaning fluid and hydrocarbon cleaning fluid in an ultrasonic cleaning tank to remove oil stains, rust spots and pollutants, then dry it with nitrogen and place it into the coating vacuum chamber;

[0034] (2) Pump the vacuum system to 2.0×10 through mechanical pump, Roots pump and molecular pump in turn -3 Pa and below, turn on the hollow cathode ion source, adjust the current to 200A, and the bias voltage to 800V. Blow in argon, keep the pressure at 5Pa, bombard and clean for 30 minutes to further remove contaminants on the sample or substrate surface;

[0035] (3) Turn on the magnetron sputtering target (the target is Ti), adjust the peak current to 200A, the bias voltage of 300-500V, adjust the argon gas to 1.5Pa, and deposit for 40 minutes; pass in 10% nitrogen and 25-35% Methane (compared with argon gas phase), adjust the current 0.5-15A, bias 300-500V, adjust argon to 0.5-1.5Pa, deposit for 40-60 minutes, and obtain...

Embodiment 3

[0040] (1) Wash the silicon wafer substrate with a water-based cleaning solution and a hydrocarbon cleaning solution in an ultrasonic cleaning tank to remove oil stains, rust spots and pollutants, then dry it with nitrogen and place it into the coating vacuum chamber;

[0041] (2) Pump the vacuum system to 2.0×10 through mechanical pump, Roots pump and molecular pump in turn -3 Pa and below, turn on the hollow cathode ion source, adjust the current to 300A, and the bias voltage to 600V. Blow in argon gas, keep the pressure at 3Pa, bombard and clean for 30 minutes to further remove contaminants on the sample or substrate surface;

[0042] (3) Turn on the magnetron sputtering target (the target is Ti), adjust the peak current to 200A, bias 300-400V, adjust the argon to 1Pa, and deposit for 30 minutes; pass in 15% nitrogen and 255% methane (the same Argon gas phase comparison), adjust current 6A, bias voltage 500V, adjust argon to 1.5Pa, and deposit for 40 minutes to obtain metal carb...

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Abstract

The invention relates to a super-lubricity performance metal/hydrogen-containing carbon composite thin film. The composite thin film comprises a hydrogen-containing carbon thin film deposited on a base material or the surface of a part and a metal thin film (gold, silver, copper and the like) deposited on the surface of the hydrogen-containing carbon thin film, wherein the carbon thin film is thehydrogen-containing carbon thin film with the hydrogen content of 15% to 28%, the thickness is 800 nm, and the thickness of the metal thin film is less than or equal to 100 nm. A target thin film containing hydrogen carbon is prepared by plasma chemical vapor deposition, and magnetron sputtering and the like, then metal is loaded through a high power micropulse magnetron sputtering or evaporationplating mode, and the super-lubricity performance metal/composite thin film containing hydrogen carbon can be obtained. In a friction process, the metal can catalyze amorphous hydrogen-containing carbon to form sequential multilayer graphene structures, and incommensurate contact of the multilayer graphene structures can achieve super-lubricity in a macro-scale atmospheric environment, an inertiaatmosphere, and vacuum. As a result, engineering application of a super-lubricity technology under the condition of cross-environment can be expected to achieve.

Description

Technical field [0001] The invention relates to the preparation of a hydrogen-containing carbon composite film, in particular to a super-slip metal / hydrogen-carbon composite film and a preparation method thereof, belonging to the field of solid lubrication and tribology. Background technique [0002] Friction is accompanied by the origin of life and the development of human society. In the 21st century, friction and lubrication have become an inseparable part of the development of human civilization and technological progress. About 1 / 3~1 / 2 of the primary energy used in the world is consumed by friction, and 80% of the vulnerable parts of mechanical products are scrapped and replaced due to wear exceeding the limit. Abrasion is not only the loss of materials, but also the waste of energy and the emission of pollutants caused by friction. According to reports, 23% of energy consumption in industrial countries is due to friction. Among them, 80% of the failures of mechanical comp...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/18C23C14/24C23C14/35C23C16/26C23C16/515C23C28/00
CPCC23C14/0036C23C14/0605C23C14/0664C23C14/18C23C14/185C23C14/221C23C14/24C23C14/3485C23C14/352C23C16/26C23C16/515C23C28/322C23C28/34
Inventor 张斌贾倩张俊彦高凯雄张兴凯
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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