Method for improving response of optical excitation flexible substrate gas sensor at room temperature
A gas sensor, flexible substrate technology, applied in instruments, scientific instruments, measuring devices, etc., can solve the problems of underutilization of sensitive materials, huge pressure in the preparation of sensitive materials, etc., and is beneficial to large-scale promotion and utilization, The effect of improving photogenerated charge separation efficiency and improving gas sensing performance
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Embodiment 1
[0033] Such as Figure 1-5 As shown, a method for improving the response of a light-excited flexible substrate gas sensor at room temperature includes the following steps:
[0034] (1) The polyimide flexible base layer 4 with a thickness of 150 μm is ultrasonically cleaned with acetone, the power is 40 W, and the ultrasonic time is 5 min to remove oil stains on the surface. Rinse with deionized water repeatedly until the deionized water remains evenly on the surface, then rinse it in analytical pure ethanol, take it out and blow dry.
[0035] (2) Put the substrate in step (1) into the coating machine while filling it with argon gas, and use the electron emission electrons from the vacuum chamber of the coating machine to make the argon gas store and bombard the surface of the substrate to improve the cleanliness of the substrate. The flow rate of argon is 100 sccm, and the electrode voltage of the coater is 50W.
[0036] (3) Prepare a metal aluminum film on the surface of the substr...
Embodiment 2
[0043] Such as Figure 1-4 As shown, based on Example 1, a method for improving the response of a light-excited flexible substrate gas sensor at room temperature includes the following steps:
[0044] (1) The polyimide flexible base layer 4 with a thickness of 150 μm is ultrasonically cleaned with acetone, the power is 30 W, and the ultrasonic time is 10 min to remove oil stains on the surface. Rinse with deionized water repeatedly until the deionized water remains evenly on the surface, then rinse it in analytical pure ethanol, take it out and blow dry.
[0045] (2) Put the substrate in step (1) into the coating machine while filling it with argon gas, and use the electron emission electrons from the vacuum chamber of the coating machine to make the argon gas store and bombard the surface of the substrate to improve the cleanliness of the substrate. The flow of argon is 100 sccm, and the electrode voltage of the coater is 40W.
[0046] (3) Prepare a metal platinum film on the surf...
Embodiment 3
[0050] Such as Figure 1-4 As shown, based on Example 1, a method for improving the response of a light-excited flexible substrate gas sensor at room temperature includes the following steps:
[0051] (1) The polyimide flexible base layer 4 with a thickness of 150 μm is ultrasonically cleaned with acetone, the power is 30 W, and the ultrasonic time is 5 min to remove oil stains on the surface. Rinse with deionized water repeatedly until the deionized water remains evenly on the surface, then rinse it in analytical pure ethanol, take it out and blow dry.
[0052] (2) Put the substrate in step (1) into the coating machine while filling it with argon gas, and use the electron emission electrons from the vacuum chamber of the coating machine to make the argon gas store and bombard the surface of the substrate to improve the cleanliness of the substrate. The argon flow rate is 80 sccm, and the electrode voltage of the coater is 40W.
[0053] (3) Prepare a metal zinc film on the surface ...
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