High-flux super-resolution focal spot generation device based on optical fibers

A generation device and super-resolution technology, applied in the field of optical engineering, can solve problems such as low throughput of systems and technical solutions, achieve the effects of reducing device cost and system space, improving processing speed and imaging speed, and compact system structure

Active Publication Date: 2020-12-08
ZHEJIANG LAB
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  • Abstract
  • Description
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Problems solved by technology

[0004] However, the current development of this technology has only achieved a huge breakthrough in resolution, and its system and technical solutions still belong to the category of low-throughput processing.

Method used

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  • High-flux super-resolution focal spot generation device based on optical fibers
  • High-flux super-resolution focal spot generation device based on optical fibers
  • High-flux super-resolution focal spot generation device based on optical fibers

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Embodiment Construction

[0017] figure 1 Only 3-way light is taken as an example and only the chief light of each light is drawn for illustration, the actual number and arrangement are not limited.

[0018] Such as figure 1 As shown, the present invention is a fiber-based high-throughput super-resolution focal spot generation device, including a suppressed light laser array 1, a suppressed vortex fiber array 2, a first microlens array 3, and a first multi-channel acousto-optic modulator 4. The first half-wave plate 5, the first quarter-wave plate 6, the second microlens array 7, the first pinhole array 8, the first lens 9, the second lens 10, the mirror 11, the dichroic mirror 12. Excitation laser array 13, excitation optical fiber array 14, third microlens array 15, second multi-channel acousto-optic modulator 16, second half-wave plate 17, second quarter-wave plate 18, fourth Micro-lens array 19, the second aperture array 20, the third lens 21, the fourth lens 22, the fifth lens 23, the half mirro...

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Abstract

The invention discloses a high-flux super-resolution focal spot generation device based on optical fibers. The high-flux super-resolution focal spot generation device firstly generates a suppression light beam array, and each path of laser is coupled to a vortex optical fiber, so that a light beam carrying a vortex phase can be formed, and the device cost and the system space can be reduced; thenspecific intensity modulation is carried out through a multi-channel acoustic modulator to generate high-flux dark spots; meanwhile, an exciting light beam array is coupled into an exciting path optical fiber array, and then specific intensity modulation is carried out through a multi-channel acoustic optical modulator to generate solid light spots; and finally, the two light beam arrays are combined, two overlapped light spot arrays are formed through focusing of an objective lens, and a super-resolution focal spot array is formed through the inhibition effect of the dark spots on the actionrange of the solid light spots. According to the high-flux super-resolution focal spot generation device, independent regulation and control of the dark spots can be realized to realize high-flux laser direct writing processing and parallel super-resolution microscopic imaging, and the processing speed and the imaging speed are effectively improved; and no extra modulation device is needed, and the system structure is compact.

Description

technical field [0001] The invention belongs to the field of optical engineering, in particular to an optical fiber-based high-throughput super-resolution focal spot generation device. Background technique [0002] In recent years, femtosecond laser direct writing micro-nano processing technology has achieved rapid development and diversified applications in multiple fields, and achieved a series of related achievements. As a nonlinear optical processing technology, it has many significant advantages compared with traditional photolithography technology: 1. High resolution and low thermal damage. 2. True 3D, easy integrated processing, high designability and controllability. 3. Wide range of materials and low processing environment requirements. Except for special circumstances, femtosecond laser direct writing processing can be realized under common environmental conditions such as atmosphere, solvent, and aqueous solution, and does not require special processing environm...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/073B23K26/06
CPCB23K26/073B23K26/0643B23K26/0648
Inventor 匡翠方朱大钊丁晨良郝翔刘旭
Owner ZHEJIANG LAB
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