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Photonic integrated on-chip laser gyroscope and preparation method thereof

A laser gyroscope and photon integration technology, which is applied to gyroscope/steering sensing equipment, Sagnac effect gyroscope, instruments, etc. The effect of broadening tactical application scenarios and improving adaptability

Active Publication Date: 2021-05-25
HUAZHONG PHOTOELECTRIC TECH INST (CHINA SHIPBUILDING IND CORP THE NO 717 INST)
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Aiming at the technical problems of poor sensitivity and low integration degree of the integrated optical gyroscope existing in the prior art, the present invention provides a photonic integrated on-chip laser gyroscope and a preparation method thereof

Method used

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  • Photonic integrated on-chip laser gyroscope and preparation method thereof
  • Photonic integrated on-chip laser gyroscope and preparation method thereof
  • Photonic integrated on-chip laser gyroscope and preparation method thereof

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Embodiment 1

[0037] see Figure 1-Figure 4 , an embodiment of the present invention provides a photon-integrated on-chip laser gyroscope, including: an electronic integration layer, a photon integration layer, and a substrate layer arranged from top to bottom. The upper electronic integration layer adopts SIP electrical chip; the middle photon integration layer adopts heterogeneous integration; the lower substrate layer is silicon wafer; the photon integration layer and the electronic integration layer are electrically interconnected through the bonding process.

[0038] Specifically, the SIP electrical chip includes: the first SIP chip 7 integrated with PDH frequency stabilization, laser chip driver and acousto-optic modulation chip driver, integrated with laser power stabilization, acousto-optic modulation chip driver and photodetection chip signal readout circuit The second SIP chip 8, and the third SIP chip 9 integrating photodetection chip signal readout, beat signal processing and ar...

Embodiment 2

[0044] This embodiment also provides a method for preparing a photon-integrated on-chip laser gyro, including:

[0045] Step 1, preparing a wedge-shaped optical microring cavity 1 on a silicon wafer 17 .

[0046] The silicon dioxide layer 19 oxidized and grown on the silicon wafer 17 forms a wedge-shaped optical micro-ring cavity core layer structure by photolithography and HF acid buffer wet etching; 2 The F gas etches the silicon wafer 19 to form an air cavity 22, and the air cavity 22 wraps the lower surface of the core layer of the wedge-shaped optical micro-ring cavity.

[0047] Step 2, preparing a silicon nitride transmission waveguide and realizing optical interconnection.

[0048] Use plasma-enhanced chemical vapor deposition equipment to grow 250nm thick silicon nitride, define the waveguide pattern through contact ultraviolet exposure and development; then use reactive ion etching machine to etch out the silicon nitride transmission waveguide; use phosphoric acid we...

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Abstract

The invention relates to the technical field of integrated optical gyroscopes, in particular to a photon-integrated on-chip laser gyroscope and a preparation method thereof. The photon-integrated on-chip laser gyroscope includes: an electronic integration layer, a photon integration layer and a substrate layer arranged from top to bottom; The first layer adopts SIP electrical chip; the middle photon integration layer adopts heterogeneous integration; the lower substrate layer is silicon wafer; the photon integration layer and the electronic integration layer are electrically interconnected through the bonding process. The preparation method of photonic integrated on-chip laser gyroscope includes: preparing wedge-shaped micro-ring cavity on silicon wafer; preparing silicon nitride optical waveguide and realizing optical interconnection; heterogeneously integrating active devices; preparing graphics on the silicon dioxide surface layer of silicon wafer Metallized metal for electrical interconnection; integrated SIP electrical chip. The photonic integrated on-chip laser gyroscope and the preparation method thereof provided by the invention solve the technical problems of poor sensitivity and low integration degree of the integrated optical gyroscope in the prior art.

Description

technical field [0001] The invention relates to the technical field of integrated optical gyroscopes, in particular to a photonic integrated on-chip laser gyroscope and a preparation method thereof. Background technique [0002] Inertial technology is one of the important technical means in the field of navigation. The gyroscope is an important core component of the inertial navigation system. In order to promote the construction of inertial navigation capabilities in the environment of strong confrontation and GPS denial in modern complex battlefields, and to improve the guidance application requirements of tactical weapons such as gun-launched spin-stabilized ammunition and high-dynamic long-range missiles, the miniaturization and integration of gyroscopes has become a competition among various countries. important direction of development. The development of modern technology provides more options for new high-precision micro-gyroscopes. The miniaturized gyroscopes resea...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/66
CPCG01C19/66G01C19/661
Inventor 陈福胜齐志强程俊张熙张政
Owner HUAZHONG PHOTOELECTRIC TECH INST (CHINA SHIPBUILDING IND CORP THE NO 717 INST)