Double-capacitor terahertz metamaterial electric regulation and control device structure

Abstract

The invention discloses a terahertz metamaterial electric regulation and control device structure based on indium gallium zinc oxide. The terahertz metamaterial electric regulation and control devicestructure comprises a substrate layer and a microstructure resonator array layer composed of a metal resonance ring and an indium gallium zinc oxide layer, wherein the metal resonance ring is filled and etched on the substrate layer. A first microstrip gold wire is arranged in the metal resonance ring, and the terahertz metamaterial electric regulation and control device structure also comprises aSchottky electrode connected with the first microstrip gold wire through a second microstrip gold wire. The terahertz metamaterial electric regulation and control device structure further comprises an IGZO strip in contact with the indium gallium zinc oxide layer and an ohmic electrode connected with the IGZO strip, and the Schottky electrode and the ohmic electrode are located at the two sides of the upper surface of the substrate layer respectively. The adjustment of the transmission spectral response of the terahertz wave with the specific frequency is realized by changing the conductivityof the IGZO semiconductor material; by changing the structural size in an array unit, the response wavelength can be adjusted in a larger range. The terahertz regulation and control device with the double-capacitor split-ring resonator structure is compact in structure and high in regulation and control efficiency, is simple to manufacture, and has the very good application prospect in the fieldof terahertz regulation and control.

Description

technical field [0001] The invention relates to the field of design of metamaterial electromagnetic wave control devices, in particular to a structure of a dual-capacitance terahertz metamaterial electric control device. Background technique [0002] The terahertz wave is a wave band with a frequency of 0.1-10 THz. Due to its low photon energy, strong penetrability, and the ability to carry a large amount of information, terahertz waves are used in communications, radar, security monitoring, and imaging, especially in biological imaging and chemical detection (terahertz waves domain spectrum). In recent years, due to the development of terahertz light source equipment such as ultrafast lasers, terahertz has become more and more practical. However, the development of terahertz modulation technology is relatively backward, and some research has been done, but it is still not perfect. Metamaterial modulation methods mainly include optical regulation, electrical regulation, t...

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Problems solved by technology

However, the development of terahertz modulation technology is relatively backward, and some research has been done, but it is still not perfect

Metamaterial modulation methods mainly include optical regulation, electrical regulation, thermal regulation, and mechanical regulation. There are also metamaterial control devices using liquid crystals for material control devices, but their modulation depth and bandwidth are still insufficient: Hou-TongChen reported in the Natue journal that the transmission coefficient of GaAs substrate metamaterial single-capacitance resonance structure control devices is 0.1; For liquid crystal-based metamaterial control devices, Kowerdziej reported a doublet spacing of 0.35THz

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