Coating liquid for forming metal oxide film, oxide insulator film, field-effect transistor, display element, image display device, and system
A field-effect transistor and oxide film technology, applied in transistors, metal material coating processes, electrical components, etc., can solve the problems of high process cost, complexity, and difficulty in freely controlling oxide film formulations and physical properties. performance effect
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Embodiment 1-1
[0268]
[0269] Zirconium oxynitrate dihydrate (0.50 mol) and magnesium nitrate hexahydrate (0.50 mol) were weighed. Then, ethylene glycol monomethyl ether (500 mL), propylene glycol (1800 mL), water (1200 mL), and isopropanol (1800 mL) were added and dissolved to produce a coating liquid for forming the oxide insulator film 1-1.
Embodiment 1-2 to 1-12
[0271]
[0272] In the same manner as in Example 1-1, using the material formulations shown in Tables 1-1 and 1-2, oxide insulator films 1-2 to 1-12 for forming Examples 1-2 to 1-12 were produced. 1-12 of the coating solution.
[0273] (Reference Examples 1-13 to 1-15)
[0274]
[0275] In the same manner as in Example 1-1, using the material formulations shown in Tables 2-1 and 2-2, oxide insulator films 1-13 to 1-15 for forming Reference Examples 1-13 to 1-15 were produced. 1-15 of the coating solution.
[0276] [Table 1-1]
[0277]
[0278] [Table 1-2]
[0279]
[0280] [table 2-1]
[0281]
[0282] [Table 2-2]
[0283]
[0284] In Table 1-1, Table 1-2, Table 2-1, and Table 2-2, the names of materials and solvents are as follows.
[0285]
[0286] ZrO(NO 3 ) 2 ·2H 2 O: zirconium oxynitrate dihydrate
[0287] HfCl 4 : Hafnium chloride
[0288] ZrO(C 8 H 15 O 2 ) 2 : Bis(2-ethylhexanoate)zirconia
[0289] ZrCl 4 ·8H 2 O: Zirconium dichlori...
Embodiment 2-1
[0324] Using a spin coater, the coating liquid 1-1 in Table 1-1 and Table 1-2 was printed on the alkali-free glass substrate that had undergone UV ozone cleaning. Good printing performance. The substrate was dried on a hot plate heated to 120°C for 10 minutes, and then baked at 400°C for 1 hour in the atmosphere to obtain a transparent oxide film.
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