High-temperature working DFB laser and epitaxial structure growth method

A DFB laser, epitaxial structure technology, applied in the laser, semiconductor laser, optical resonator structure and other directions, can solve the problem of laser power drop and so on

Active Publication Date: 2021-03-19
全磊光电股份有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The bandgap width of the AlInAs material matched with InP is about 1.45eV, and the bandgap width of the AlGaInAs confinement layer material is about 1.2eV. There is a higher conduction band step between the AlInAs electron blocking layer and the AlGaInAs MQW, which limits the carrier The transition out of the well greatly improves the high-temperature characteristics of the laser, but high-temperature electrons still have a greater probability of transitioning out of the MQW, resulting in a decrease in laser power at high temperatures

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  • High-temperature working DFB laser and epitaxial structure growth method
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  • High-temperature working DFB laser and epitaxial structure growth method

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Embodiment Construction

[0024] The implementation of the present invention will be illustrated by specific specific examples below, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0025] Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete and fully convey the concept of example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided in order to give a thorough understanding of embodiments of the invention. However, those skilled in the art will apprec...

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Abstract

The invention discloses a DFB laser for improving the high-temperature characteristics of a laser, and the epitaxial structure of the DFB laser comprises an InP substrate which is sequentially provided with a buffer layer, a grating layer, a lower limiting layer, a lower waveguide layer, a quantum well, an upper waveguide layer, an electron blocking layer, a corrosion blocking layer, a ridge waveguide layer, a potential barrier gradient layer and an ohmic contact layer from the bottom to the top; the electron blocking layer is a superlattice formed by AlAs0.56Sb0.44 with ternary components andAlxGa(1-x)AsySb(1-y) materials with quaternary components. According to the epitaxial structure of the DFB laser, a wide-bandgap superlattice electron blocking layer is designed through energy band engineering to limit carriers, on one hand, the probability that the carriers overflow out of a quantum well active region at high temperature is reduced through a high potential barrier, on the otherhand, the valence band potential barrier is reduced through superlattices, hole injection into the active region is facilitated, the high-temperature characteristic of the laser can be effectively improved, and the DFB laser can work normally within the temperature range of -40 DEG C to 115 DEG C.

Description

technical field [0001] The invention relates to the technical field of DFB lasers, in particular to a DFB laser capable of working at high temperature and a growth method thereof. Background technique [0002] With the rapid development of optical communications, uncooled wide-temperature single-mode DFB lasers have become key devices for long-distance and large-capacity optical fiber communications, and are widely used in access networks, data centers, 5G mobile communications, and other fields. The DFB laser establishes a Bragg grating inside the semiconductor, and relies on the distribution feedback of light to realize the selection of the single longitudinal mode. It has the characteristics of high speed, narrow line width and dynamic single longitudinal mode, and the DFB laser can work in a wider operating temperature and operating current range. The mode hopping of ordinary FP lasers is internally suppressed, and the noise characteristics of the device are greatly impr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/20H01S5/12C23C16/44C23C16/30
CPCC23C16/301C23C16/44H01S5/12H01S5/2009H01S2304/02H01S2304/04
Inventor 单智发张永姜伟陈阳华
Owner 全磊光电股份有限公司
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