Ion beam sputtering film high-temperature strain gauge and preparation method thereof

Abstract

The invention discloses an ion beam sputtering film high-temperature strain gauge and a preparation method thereof. The ion beam sputtering film high-temperature strain gauge comprises a nickel-based alloy substrate, an insulating film layer, a nickel-chromium wire grid film layer, a protective film layer and an electrode film, wherein the nickel-based alloy substrate, the insulating film layer and the nickel-chromium wire grid film layer are sequentially stacked from bottom to top; the electrode film and the protective film layer are deposited at the top of the nickel-chromium wire grid film layer through an ion beam sputter coating process, and are arranged on the same layer; the nickel-chromium wire grid film layer is formed by etching a nickel-chromium film layer deposited on the insulating film layer through an ion beam sputter coating process; the electrode film is used for connecting a high-temperature-resistant wire. The ion beam sputtering film high-temperature strain gauge can perform stable measurement work at a high temperature.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to an ion beam sputtered film high-temperature strain gauge and a preparation method thereof. Background technique [0002] Most aero engines use turbine engines as power sources, and blades, as one of the most critical components on turbine engines, will be affected by high temperature, high pressure, and high vibration during work, and long-term work will cause engine failure. Therefore, using sensors Accurately measuring the working state of an aeroengine in a high-temperature environment has always been very important for its health monitoring technology. In addition, with the high performance of machinery and equipment in various industrial sectors, the working temperature is getting higher and higher, so the strain measurement at high temperature has become a more urgent problem in engineering. Although there are many methods for measuring high temperature stress, so far, the...

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Problems solved by technology

[0003] Traditional strain gauges are usually attached to the specimen with adhesives, and the adhesive layer formed by the adhesive plays a very important role in strain measurement. It must transmit the strain of the specimen to the wire grid correctly; The presence of additives not only affects the working characteristics of the strain gauge such as creep, hysteresis, zero drift, gage coefficient, and linearity, but also has the risk of reducing the reliability of the strain gauge due to adhesive denaturation and failure at high temperatures.

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