Ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system

Abstract

The invention discloses an ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system. The system comprises an abrasive material mixing device, an abrasive material conveying device, a comprehensive control cabinet, a pulse jet polishing tool, an angle adjusting device, a workpiece rotating device, a three-axis moving module, a machining pool, a rack, a waste recovering device and a gas injection device. Pulse jet is formed according to the ultrasonic modulation principle, and the jet polishing efficiency is improved by means of the water hammer effect generated by fluid pulses; the intensity of the pulse jet is actively controlled through adjustment of the distance between the tail end of an amplitude-changing pole and the outlet of an inner cavity of a nozzle; the stability of the components of the abrasive particle flow is realized through monitoring of the concentration and viscosity of the abrasive particle flow; the pulse jet intensity is monitored in real time through an annular array sensor; cavitation erosion is avoided through an air entrainment cavitation reduction principle; and full-coverage precision polishing of the complex bent flow channel is achieved through cooperative movement of the three-axis moving module and the workpiece rotating device.

Description

Technical field [0001] The present invention relates to the technical field of ultra-precision polishing processing, and more specifically, to an ultrasonic vibration modulated pulse abrasive particle micro-jet polishing system. Background technique [0002] Microfluidic chips made of glass substrates are widely used in fields such as biomass testing. The microfluidic channel is the main place where the microfluidic chip realizes fluid transport and detection and analysis. The smoothness of the inner wall of the microfluidic channel directly determines the biochemical analysis accuracy and stability of the microfluidic chip. However, the microfluidic structure made of glass substrates, in addition to being difficult to process with hard and brittle materials, also has processing difficulties in three aspects: high depth-to-width ratio of the flow channel, obvious discontinuous surface features, and complex bending of the flow channel on the same chip. . [0003] From the p...

AI Technical Summary

Problems solved by technology

However, compared with the method and device for generating pulsed abrasive micro-jet through ultrasonic modulation, the acoustic vibration used in this invention produces cavitation, and the intensity of the jet is low, and a large number of cavitation bubbles produced have a strong impact on the nozzle and the inner wall of the jet cavity. Both are easy to cause cavitation corrosion. Also due to the small diameter of the nozzle, a large number of cavitation bubbles can easily block the nozzle hole during the polishing process.

Images