Ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system

A technology of pulse modulation and ultrasonic vibration, applied in the direction of grinding/polishing equipment, vibrating devices, abrasives, etc., can solve the problems of clogged nozzle holes, small nozzle aperture, low jet intensity, etc., to improve the overall circulation and mixing efficiency, increase Contact probability, effect of eliminating cavitation damage

Pending Publication Date: 2021-04-30
CHINA JILIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, compared with the method and device for generating pulsed abrasive micro-jet through ultrasonic modulation, the acoustic vibration used in this invention produces cavitation, and the intensity of the jet is low, and a large number of cavitation bubbles produ

Method used

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  • Ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system
  • Ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system
  • Ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system

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Embodiment approach

[0064] After starting the processing, first adjust the abrasive flow in the abrasive mixing device 01, after mixing evenly, the self-priming pump 0202 draws the abrasive flow from the middle layer of the abrasive mixing barrel 0106, and the abrasive flow is filtered through the filter disc 0203 of the self-priming pump 0202, and Under the monitoring of the ultrasonic liquid viscosity sensor 0208 and the particle concentration sensor 0209 , it is injected into the jet sleeve 0411 through the abrasive flow injection port 0405 . After injecting a certain amount of abrasive particle flow, the ultrasonic generator in the integrated control cabinet 03 starts up, converts the electric energy into a high-frequency alternating current signal that matches the ultrasonic transducer 0401, drives the ultrasonic transducer 0401 to work and emits ultrasonic waves, and then The ultrasonic energy is focused through the horn 0402, and a high-density sound field is generated inside the nozzle 040...

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Abstract

The invention discloses an ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system. The system comprises an abrasive material mixing device, an abrasive material conveying device, a comprehensive control cabinet, a pulse jet polishing tool, an angle adjusting device, a workpiece rotating device, a three-axis moving module, a machining pool, a rack, a waste recovering device and a gas injection device. Pulse jet is formed according to the ultrasonic modulation principle, and the jet polishing efficiency is improved by means of the water hammer effect generated by fluid pulses; the intensity of the pulse jet is actively controlled through adjustment of the distance between the tail end of an amplitude-changing pole and the outlet of an inner cavity of a nozzle; the stability of the components of the abrasive particle flow is realized through monitoring of the concentration and viscosity of the abrasive particle flow; the pulse jet intensity is monitored in real time through an annular array sensor; cavitation erosion is avoided through an air entrainment cavitation reduction principle; and full-coverage precision polishing of the complex bent flow channel is achieved through cooperative movement of the three-axis moving module and the workpiece rotating device.

Description

technical field [0001] The invention relates to the technical field of ultra-precision polishing, and more specifically, to an ultrasonic vibration modulation pulsed abrasive particle micro-jet polishing system. Background technique [0002] Microfluidic chips made of glass substrates are widely used in biological quality inspection and other fields. The microfluidic channel is the main place for the microfluidic chip to realize fluid transport and detection and analysis. The smoothness of the inner wall of the microfluidic channel directly determines the accuracy and stability of the biochemical analysis of the microfluidic chip. However, in addition to the difficult-to-process characteristics of hard and brittle materials, the micro-channel structure made of glass substrates also has three processing difficulties: high channel depth-width ratio, obvious discontinuous surface features, and complex bending of the same chip channel. . [0003] From the perspective of the re...

Claims

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Application Information

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IPC IPC(8): B24C1/08B24C5/00B24C5/04B24C7/00B24C9/00B01F7/00B01F7/16B01F15/04
CPCB24C1/08B24C5/005B24C5/04B24C7/0038B24C9/00B01F27/1921B01F27/808B01F35/82Y02P70/10
Inventor 葛江勤任以勒谷梦瑶周翰涛钱潘裕
Owner CHINA JILIANG UNIV
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