Aluminum plate with multiple layers of reflecting films and vacuum film plating process thereof

Abstract

The invention discloses an aluminum plate with multiple layers of reflecting films. The aluminum plate with the multiple layers of reflecting films comprises an aluminum material body; the surface of the aluminum material body is sequentially plated with multiple layers of films from inside to outside; the multiple layers of films totally comprise twenty-five layers of films; the first layer of film is a connecting layer; the second layer of film is a transition layer; the third layer of film is an absorption layer; the fourth layer to the eighteenth layer of films are reflective film stacking layers; the nineteenth layer to the twenty-third layer of films are color matching film stacking layers; and the twenty-fourth layer to the twenty-fifth layer of films are protective layers. The invention belongs to the technical field of metal medium film plating, and particularly provides an aluminum plate with the multiple layers of reflecting films and a vacuum film plating process thereof. The aluminum plate with the multiple layers of reflecting films is high in reflection, resistant to high temperature and high in film layer firmness, is applied to ultraviolet curing lamp equipment and effectively improves the ultraviolet light reflection energy efficiency of the equipment.

Description

technical field [0001] The invention belongs to the technical field of metal dielectric coating, in particular to an aluminum plate with a multilayer reflective film and a vacuum coating process thereof. Background technique [0002] During the semiconductor manufacturing process, it is often necessary to cure the deposited film to obtain the desired film properties. In the past, heating and baking was often used to cure the film, but the thermal curing speed is slow, the energy consumption is high, and the equipment and process are complicated. At present, it has been gradually replaced by ultraviolet curing (UVcure). [0003] UV curing uses the photosensitivity of photoinitiators. Under the irradiation of ultraviolet light, photoinitiation forms excited ecological molecules, decomposes into free radicals or ions, and makes unsaturated organic compounds undergo chemical reactions such as polymerization, grafting, and crosslinking to achieve curing. Purpose. [0004] The c...

AI Technical Summary

Problems solved by technology

However, the traditional UV curing lamp uses ordinary aluminum as the reflector, the reflected energy is low, usually only up to 70%, the reflected infrared heat is high, and the surface hardness of the aluminum is low, and the corrosion resistance is poor

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