Methacrylic resin, preparation method thereof and photoresist

A technology of methacrylic acid and methyl methacrylate, applied in the chemical field, can solve the problems of long reaction time, small chain polymers, large amount of solvent synthesis effect, unsatisfactory and other problems

Active Publication Date: 2021-05-11
NINGBO NATA OPTO ELECTRONICS MATERIAL CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The embodiment of the present invention provides a method for preparing methacrylic resin, which aims to solve the problem of long reaction time, many small-chain polymers in the reaction system, and the need for a large amount of solvent and synthesis effect in the later stage of precipitation, washing and purification in the traditional preparation method. Unsatisfactory and other technical defects

Method used

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  • Methacrylic resin, preparation method thereof and photoresist
  • Methacrylic resin, preparation method thereof and photoresist
  • Methacrylic resin, preparation method thereof and photoresist

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preparation example Construction

[0014] Such as figure 1 As shown, the embodiment of the present invention provides a method for preparing methacrylic resin. Described methacrylic resin preparation method comprises the steps:

[0015] Step S10, uniformly mixing tetrahydrofuran and ethyl acetate to form a mixed solvent;

[0016] Step S20, adding methyl methacrylate, butyl acrylate and 2-methyl-2-adamantyl methacrylate into the mixed solvent, adding an initiator after dissolving to form a mixed solution;

[0017] Step S30, in a protective gas, the mixed solution is subjected to a polymerization reaction at boiling temperature;

[0018] Wherein, the volume ratio of tetrahydrofuran and ethyl acetate in the mixed solvent is 1:3 to 3:1.

[0019] The traditional polymerization method of methacrylic resin is to add an initiator in the solution, heat and reflux in a water bath or an oil bath, and carry out free radical polymerization to control the molecular weight of the methacrylic resin. In order to achieve the...

Embodiment 1

[0030] The invention provides a kind of mixed solvent method to carry out methacrylic resin polymerization, comprises the following steps:

[0031] (1) Put 1 part of tetrahydrofuran and 1 part of ethyl acetate in a four-necked flask, stir until they are evenly mixed, where the solvent is the volume ratio;

[0032] (2) 50g of methyl methacrylate, 30g of butyl acrylate and 20g of 2-methyl-2-adamantyl methacrylate are placed in a four-necked flask containing 300g of tetrahydrofuran-ethyl acetate mixed solvent , stir until the monomers are evenly mixed;

[0033] (3) After the monomer is dissolved, add benzoyl peroxide, stir until dissolved, and the dosage of benzoyl peroxide is 5 g;

[0034] (4) Place the four-necked flask equipped with the reaction solution in an oil bath equipped with a magnetic stirrer, install the condenser tube, and the nitrogen port, turn on the condensed water, feed nitrogen, turn on the stirring and raise the temperature To the boiling point of the mixed...

Embodiment 2

[0038] The invention provides a kind of mixed solvent method to carry out methacrylic resin polymerization, comprises the following steps:

[0039] (1) Put 3 parts of tetrahydrofuran and 1 part of ethyl acetate in a four-necked flask, stir until they are evenly mixed, where the solvent is the volume ratio;

[0040] (2) 50g of methyl methacrylate, 30g of butyl acrylate and 20g of 2-methyl-2-adamantyl methacrylate are placed in a four-necked flask containing 300g of tetrahydrofuran-ethyl acetate mixed solvent , stir until the monomers are evenly mixed;

[0041] (3) After the monomer is dissolved, add benzoyl peroxide, stir until dissolved, and the dosage of benzoyl peroxide is 5 g;

[0042] (4) Place the four-necked flask equipped with the reaction solution in an oil bath equipped with a magnetic stirrer, install the condenser tube, and the nitrogen port, turn on the condensed water, feed nitrogen, turn on the stirring and raise the temperature To the boiling point of the mixed ...

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Abstract

The invention provides a preparation method of methacrylic resin. The method comprises the steps of uniformly mixing tetrahydrofuran and ethyl acetate to form a mixed solvent; adding methyl methacrylate, butyl acrylate and 2-methyl-2-adamantyl methacrylate into the mixed solvent, dissolving, and adding an initiator to form a mixed solution; and carrying out polymerization reaction on the mixed solution at boiling temperature in protective gas, wherein the volume ratio of tetrahydrofuran to ethyl acetate in the mixed solvent is 1: 3 to 3: 1. The invention also provides methacrylic resin. The boiling point of the mixed solution is adjusted by adjusting the ratio of tetrahydrofuran to ethyl acetate in the mixed solvent, so that the purpose of controlling the reaction temperature is achieved, and then the decomposition rate of an initiator is controlled through different reaction temperatures, the polymerization reaction rate is increased, and the molecular weight of a polymerization product is controlled.

Description

technical field [0001] The invention belongs to the technical field of chemistry, and in particular relates to a methacrylic resin, a preparation method thereof, and a photoresist. Background technique [0002] As a photosensitive material, photoresist is a key processing material for integrated circuit fine processing technology. Among them, methacrylic acid resin, as a part of the photoresist composition, determines the performance of the photoresist, and is currently a hot spot in the research of photoresist materials. [0003] After determining the resin composition, resins with different molecular weights determine the performance of the photoresist, so in order to meet the requirements of the photoresist, it is necessary to prepare methacrylic resins with different molecular weights. In the traditional method, an initiator is added to the emulsion or solution, and the molecular weight of the methacrylic resin is controlled by a free radical polymerization reaction by ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08F220/14C08F220/18C08F2/06G03F7/004
CPCC08F220/14C08F2/06G03F7/004C08F220/1804C08F220/1811C08F2500/03
Inventor 陈鹏马潇顾大公毛智彪许从应
Owner NINGBO NATA OPTO ELECTRONICS MATERIAL CO LTD
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