Hybrid integrated photoelectric chip, optical modulator and optical fiber gyroscope
An optoelectronic chip, hybrid integration technology, applied in instruments, optics, nonlinear optics, etc., can solve the problems affecting the zero bias stability of the interferometric fiber optic gyroscope, and achieve a simple manufacturing process, high device reliability, and fewer fiber couplings. Effect
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Embodiment 1
[0049] Such as image 3 Shown is a schematic structural diagram of an embodiment of the hybrid integrated optoelectronic chip of the present invention, which is a top view structure.
[0050] Specifically, the hybrid integrated optoelectronic chip provided in this embodiment includes: electro-optic crystal substrate 200, PLC optical waveguide substrate 300, first straight waveguide 201, second straight waveguide 202, third straight waveguide 203, fourth straight waveguide 204 . The first branch 211 of the modulation electrode, the second branch 212 of the modulation electrode, the first Y-branch waveguide 301 , the second Y-branch waveguide 302 , and the arc waveguide 311 .
[0051] Wherein, the electro-optic crystal substrate 200 is an optical crystal with linear electro-optic effect, such as lithium niobate (LiNbO3), lithium tantalate (LiTaO3), lead lanthanum zirconate titanate (PLZT) or potassium titanyl phosphate (KTP).
[0052] In a preferred embodiment, lithium niobate ...
Embodiment 2
[0086] Such as Figure 7 Shown is a second embodiment of the invention.
[0087] In this embodiment, the placement position of the modulation electrode and the structure of the second Y branch have been changed:
[0088] The first branch 211 of the second modulation electrode and the second branch 212 of the modulation electrode are respectively placed on both sides of the first straight waveguide 201 and the fourth straight waveguide 204 for transmission in the first straight waveguide 201 and the fourth straight waveguide 204 The phase of the light wave is modulated. No modulation electrodes are placed in the second straight waveguide 202 or the third straight waveguide 203, and are only used for the transmission of light waves. For example, the second straight waveguide 202 is connected with a laser light source for introducing incident light waves, and the third straight waveguide 203 is connected with a photodetector. The connection is used to introduce light waves into...
Embodiment 3
[0094] Such as Figure 8 and Figure 9 Shown is the third embodiment of the present invention.
[0095] In this embodiment, the electro-optic crystal substrate 200 adopts a Z-cut lithium niobate crystal. In order to utilize the maximum electro-optic coefficient r33 of the Z-cut lithium niobate crystal, one branch of the modulation electrode needs to be placed directly above the optical waveguide, and the other branch is placed on one side of the modulation electrode branch. exist Figure 8 Among them, the first branch 211 of the modulation electrode is placed directly above the third straight waveguide 203 and the fourth straight waveguide 204, and a second branch 212 of the modulation electrode is placed between the third straight waveguide 203 and the fourth straight waveguide 204, or it can also be placed The two second branches 212 of the modulation electrodes, of course, the second branches 212 of the modulation electrodes can also be placed on the other side of the th...
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