Recyclable carbon nanotube dry glue and preparation method thereof
A carbon nanotube, carbon nanotube array technology, applied in the direction of amide/imide polymer adhesives, non-polymer adhesive additives, adhesive types, etc., can solve the problems of poor recycling performance, etc. Achieve the effect of low cost, high efficiency, and improved recycling performance
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[0031] see figure 1 , the preparation method of the recyclable carbon nanotube dry glue provided by the present invention, the preparation method mainly includes the following steps:
[0032]Step 1, growing a carbon nanotube array on a silicon substrate. The diameter of the carbon nanotube array is uniform and has a predetermined height and density.
[0033] Step one specifically includes the following steps:
[0034] (1) A buffer layer is plated on the silicon substrate by magnetron sputtering, and then a catalyst film is plated on the buffer layer.
[0035] The crystal plane orientation of the silicon wafer base is N-type single-polished single-crystal silicon of 001; the selective magnetron sputtering method successively deposits an alumina buffer layer and an iron catalyst film to ensure the uniformity of the thickness of the catalyst film and promote the preparation process. The carbon nanotubes have a uniform diameter.
[0036] (2) Putting the silicon wafer substrate...
Embodiment 1
[0049] The preparation method of the recyclable carbon nanotube dry glue provided in Example 1 of the present invention mainly includes the following steps:
[0050] (1) Using magnetron sputtering (PVD) at 5*5mm 2 Aluminum oxide buffer layer and iron catalyst are coated on the surface of single-sided polished silicon wafer, wherein the alumina buffer layer adopts radio frequency reactive sputtering, feeds high-purity argon gas 12 sccm (standard ml / min), high-purity oxygen gas 3 sccm, sputtering power is 200W, the reaction time is 10min; the iron catalyst is sputtered by direct current, 12sccm of high-purity argon gas is introduced, the sputtering power is 20W, and the sputtering time is 30s. The thickness of the finally prepared alumina buffer layer is 10 nm, and the thickness of the iron catalyst is 4 nm.
[0051] (2) adopt water-assisted chemical vapor deposition method to prepare carbon nanotube array, wherein, the diameter of tube's furnace is 1 inch, and gas total flow i...
Embodiment 2
[0058] The preparation method of the recyclable carbon nanotube dry glue provided by Example 2 of the present invention is basically the same as that of Example 1, the difference is that the growth time in step (2) ranges from 150 to 180s, and the prepared carbon nanotube array has a height of The range is 50~250μm, the density range is 15~30mg / cm 3 . The obtained carbon nanotube / poly(N-isopropylacrylamide) composite dry adhesive with carbon nanotube height of 56 μm and 208 μm in water has an underwater adhesion strength of 3.76 N / cm 2 、4.28N / cm 2 , by changing the temperature to conduct a cycle adhesion strength test, cycle until the adhesion strength 2 , the number of cycles recorded as image 3 shown.
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