Depletion mode field effect transistor device and preparation method thereof
A field-effect transistor, depletion-mode technology, used in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problems of low withstand voltage, large leakage current, and large on-resistance of the device, and achieve a short current path. , The effect of low on-resistance and high breakdown voltage
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Embodiment 1
[0059] The present invention provides a depletion type field effect transistor device, such as Figure 10 As shown, including:
[0060] A substrate 1;
[0061] A first epitaxial layer 2 is formed on the upper surface of the substrate 1, and the first epitaxial layer 2 includes at least two column zones 3, at least two column region 3 intervals, and each of the first column zone 3 The upper surface of the epitaxial layer 2 extends downward;
[0062] A second epitaxial layer 4 is formed on the upper surface of the first epitaxial layer 2, and the second epitaxial layer 4 includes at least two well regions 5 and deep groove 6, each of which is respectively corresponding to the corresponding well region, respectively. The 5 phase is connected, and the longitudinal direction from the upper surface of the second epitaxial layer 4 penetrates through the second epitaxial layer 4 to the corresponding column region 3;
[0063] A gate oxide layer 6 is formed in the deep groove 6 and the upper...
Embodiment 2
[0073] Such as figure 1 As shown, the preparation process of the exhaustive field effect transistor device is as follows:
[0074] Step S1 provides a first conductivity type substrate 1, and the upper surface of the substrate 1 forms a first epitaxial layer 2, the conductivity type of the first epitaxial layer 2, and the electrically conductive type of the substrate 1 are the same;
[0075] In step S1, if figure 2 As shown, first, a first conductive type silicon wafer is selected as a substrate 1, and the first conductivity type is a p-type, or the first conductivity type is n-type, preferably, the substrate 1 is N +-type substrate 1, in N + The upper surface of the substrate 1 is grown to form a first epitaxial layer 2, and the first epitaxial layer 2 is also a first conductive type, and if the substrate 1 is n-type, i.e., the first epitaxial layer 2 is also n-type.
[0076] As a preferred embodiment, the resistivity of the substrate 1 is [0.0005 Ω * cm, 0.002Ω * cm]. The electri...
Embodiment 3
[0109] Such as Figure 11 As shown, when the distance between the two deep grooves is closer, for example, when less than 10 um, then in step S2, the column region 3 formed in the first epitaxial layer 2 is two, The two column region 3 are arranged, and the two column regions 3 correspond to the position of the dark groove in the longitudinal direction, and the resulting super knot MOS device current is shorter, the on-resistance is lower, current capability More stronger, the wearing voltage is high.
[0110] The advantageous effects of the technical solution of the present invention are:
[0111] In the present invention, the gate oxide layer is disposed longitudinally, and inserted into the silicon, when the gate is not added, due to the presence of the N-channel, the current longitudinal flow, the current is shorter, and the current resistance is turned on. Lower, the current capacity is stronger; when the gate is applied, the device is turned off, the depletion zone is widen, ...
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Abstract
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