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Silicon-based optical waveguide mode filter based on directional coupling structure and preparation method thereof

A silicon-based optical waveguide and directional coupling technology, applied in optical waveguides, light guides, instruments, etc., can solve the problems of speed, delay, noise and power consumption that cannot meet the high-speed and large-capacity requirements of integrated communication, and achieve benefits for optoelectronics. The effect of hybrid integration, small device size, and broad application prospects

Active Publication Date: 2021-08-24
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional metal electrical interconnection networks are limited by physical characteristics, and the rate, delay, noise and power consumption levels cannot meet the high-speed and large-capacity requirements of future on-chip integrated communications

Method used

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  • Silicon-based optical waveguide mode filter based on directional coupling structure and preparation method thereof
  • Silicon-based optical waveguide mode filter based on directional coupling structure and preparation method thereof
  • Silicon-based optical waveguide mode filter based on directional coupling structure and preparation method thereof

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Effect test

Embodiment 1

[0032] 1. Cleaning the SOI sheet: Put the standard SOI sheet with a silicon thickness of 220nm on the top layer into an ultrasonic cleaner, clean it with propanol solution for 15 minutes, and then clean it with methanol, isopropanol and deionized water in the ultrasonic cleaner for 10 minutes. Dry the cleaned SOI sheet with a nitrogen gun, and heat it on a hot plate at 150°C for 5 minutes to dry the surface moisture of the sample sheet;

[0033] 2. Coating: put the dried SOI sheet into the coating machine, spin coat PMMA photoresist, the speed of coating is 2500rpm, and the time is 60 seconds;

[0034] 3. Pre-baking: put the sample after uniform glue on the hot plate for pre-baking, the temperature is 180 ° C, and the time is 10 minutes;

[0035] 4. Electron beam lithography (EBL, E-Beam Lithography): Put the spin-coated photoresist sample into the EBL equipment cabin, and move the sample to the pre-set scanning position, and then use the pre-designed The waveguide pattern fi...

Embodiment 2

[0041] as attached figure 1 As shown, the present invention realizes the input of multiple modes in the input waveguide and the output of high-order modes in the output waveguide, and separates the fundamental mode from the device to realize a mode filtering function. The structure adopted is a directional coupling structure. The principle is that the effective refractive indices of different modes of light transmitted in a few-mode waveguide are different, which leads to the realization of ideal coupling, that is, the energy is completely coupled from one optical waveguide to another optical waveguide. The required coupling lengths vary from one another. E 21 ,E 31 mode of light is ideally coupled in the coupling region, E 11 The light of the mode stays in the input waveguide and is led out by the S-shaped waveguide to realize the function of filtering the mode.

[0042] as attached figure 2 As shown, the components are: silicon substrate 1 , silicon dioxide lower clad...

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Abstract

The invention discloses a silicon-based optical waveguide mode filter based on a directional coupling structure and a preparation method thereof, and belongs to the technical field of integrated optoelectronics. The silicon-based optical waveguide mode filter is composed of a silicon substrate, a silicon dioxide upper cladding, a silicon dioxide lower cladding, and a silicon core layer input waveguide Core1 and a silicon core layer output waveguide Core2 which are located between the upper cladding layer and the lower cladding layer, wherein the structure parameters of the silicon core layer input waveguide Core1 and the structure parameters of the silicon core layer output waveguide Core2 are the same. The input waveguide Core1 and the output waveguide Core2 are few-mode waveguides and can transmit three modes of E11, E21 and E31 at the same time; both the input waveguide Core1 and the output waveguide Core2 are of straight waveguide structures with rectangular sections; by designing the sizes of the input waveguide Core1 and the output waveguide Core2 of the silicon core layer, the waveguide distance between the two waveguides and the coupling length, the filtering function of a specific mode can be realized. The preparation method is simple, does not need complex and expensive process equipment and a high-difficulty preparation technology, is compatible with a traditional semiconductor process, is easy to integrate, is suitable for large-scale production, plays an important role in a mode division multiplexing transmission system, and has a very wide application prospect.

Description

technical field [0001] The invention belongs to the technical field of integrated optoelectronics, and specifically relates to a silicon-based optical waveguide filter based on a directional coupling structure and a preparation method thereof. The device is an important device in a mode division multiplexing / demultiplexing chip and system, and is used in Information processing and optical communication of high-order modes have very important application value and development prospects. Background technique [0002] With the rapid development of communication technology and the continuous progress of science and technology, especially with the vigorous development of 5G, multimedia, artificial intelligence and other services, various smart devices are gradually popularized and applied. Based on data storage, transmission and processing The "big data era" has put forward higher requirements for the transmission of communication networks and single-chip multiprocessors. How to ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/12G02B6/136
CPCG02B6/12G02B6/136G02B2006/12109
Inventor 王希斌杨凯迪林柏竹孙士杰谷岳余启东张大明
Owner JILIN UNIV
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