Manufacturing method of n-type low-resistivity 4H-SiC ohmic contact
A technology of ohmic contact and low resistivity, which is applied in the field of microelectronics manufacturing technology, can solve problems such as high product stability, high yield rate, and academic controversy.
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[0042] like Figure 4 As shown, an n-type low-resistivity 4H-SiC ohmic contact manufacturing method provided in an embodiment of the present invention includes:
[0043] Step 1, select the n-type 4H-SiC heavily doped substrate 1, in the embodiment of the present invention, the doping concentration range of the n-type 4H-SiC heavily doped substrate 1 is 10 17 cm -3 ~10 18 cm -3 , the thickness of the n-type 4H-SiC heavily doped substrate 1 is 50 μm to 400 μm;
[0044] Step 2, using a mixed solution of concentrated sulfuric acid and hydrogen peroxide to fully clean the back surface of the n-type 4H-SiC heavily doped substrate 1 to remove organic matter and pollutants on the back surface of the substrate.
[0045] Step 3, using a mixed solution of HF acid and water to etch the back surface of the n-type 4H-SiC heavily doped substrate 1 to remove the SiO naturally generated on the substrate surface 2 .
[0046] Step 4, depositing a metal nickel layer 2 on the back surface of...
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