A kind of resonant pressure sensor and preparation method thereof

Abstract

The invention discloses a resonant pressure sensor and a preparation method thereof. The pressure sensor includes a silicon carbide resonator, the silicon carbide resonator is connected with a pressure sensitive film through an anchor point, the silicon carbide resonator includes a support beam, and the support beam is connected to the flexible beam through a flexible beam. The external frame is connected, the support beam is connected to the fixed electrode and fixed at the anchor point, the mass block structure is connected to the support beam through the resonant beam, the coupling beam is connected to the mass block structure through the triangular beam, the coupling beam is connected to the movable electrode, and the mass block structure It is connected with another movable electrode, the fixed electrode and the movable electrode are both comb-toothed electrodes, and constitute two pairs of comb-toothed electrode pairs, the coupling beam is provided with a vibration pickup resistor, and is connected with a metal electrode lead, through the design of the triangular beam The stress concentration area of ​​the coupling beam is increased, and the detection accuracy of the pressure sensor is improved with the arrangement of the pickup resistor. Based on the excellent characteristics of the third-generation semiconductor material silicon carbide, long-term stability in high-temperature environments is obtained.

Description

technical field [0001] The invention belongs to the technical field of MEMS, and in particular relates to a resonant pressure sensor and a preparation method thereof. Background technique [0002] The pressure sensor is a device that converts non-electricity into electrical signals. It is widely used in production measurement. It is common in various production automation control fields and plays an important role in improving equipment accuracy, safety and quality. Pressure sensors are widely used in major engineering fields such as new fighter jets, aerospace vehicles, cruise missiles, aircraft carriers, aerospace ground test systems, and UAV monitoring. [0003] Common pressure sensors include resonant pressure sensors, capacitive pressure sensors, etc. The main advantages of capacitive pressure sensors are low input energy, fast dynamic response, and good environmental adaptability. However, its pressure detection range is limited and its nonlinearity is obvious, so it...

AI Technical Summary

Problems solved by technology

At the same time, common pressure sensors use silicon as their sensitive film structure, so the temperature drift is large, the stability is insufficient, and it is difficult to use under high temperature conditions.

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