TSV-based compact power divider using parallel RC
A compact and power divider technology, applied in the direction of inductors, electric solid devices, semiconductor devices, etc., can solve the problems of transmission power leakage, etc., and achieve the effects of reducing electromagnetic interference, high integration, and reducing floor space
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[0019] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
[0020] The present invention is a compact power divider using parallel RC based on TSV (through silicon via), such as Figure 1~3 As shown, it includes an upper silicon dioxide layer 1 and a lower silicon dioxide layer 2 arranged in parallel up and down, and a silicon substrate 3 is filled between the upper silicon dioxide layer 1 and the lower silicon dioxide layer 2; the upper silicon dioxide layer 1 There are input compensation capacitors C in turn 1 , output isolation capacitor C 2 and isolation resistance R 2 , the input compensation capacitor C 1 , output isolation capacitor C 2 There is a TSV inductor L made by winding TSV4 in parallel 1 and the TSV inductor L made by winding the TSV arrangement 2 ;TSV inductance L 1 and TSV inductor L 2 It is arranged in the silicon substrate in the vertical direction. TSV inductor L 1 and TSV...
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