Laser-based frequency tripling device and laser system

Abstract

The invention belongs to the field of lasers, and particularly relates to a laser-based frequency tripling device and a laser system. The laser-based frequency tripling device comprises a first frequency doubling unit arranged at a first preset position; a second frequency doubling unit arranged at a second preset position, wherein the first frequency doubling unit and the second frequency doubling unit are symmetrically arranged; a nonlinear crystal arranged between the first frequency doubling unit and the second frequency doubling unit; a third frequency doubling unit arranged at a third preset position; a fourth frequency doubling unit arranged at a fourth preset position, wherein the third frequency doubling unit and the fourth frequency doubling unit are symmetrically arranged; and a nonlinear sum frequency crystal arranged between the third frequency doubling unit and the fourth frequency doubling unit.

Description

technical field [0001] The invention belongs to the field of lasers, in particular to a laser-based triple frequency device and a laser system. Background technique [0002] Ultraviolet (UV) lasers are widely used in the field of industrial micromachining, such as marking, drilling, scribing, welding, cutting of industrial parts, micromachining of medical equipment, packaging of electronic components, three-dimensional molding of micro components, etc. In addition, in microelectronics, spectral analysis, optical data storage, optical disc control, atmospheric detection, photochemistry, photobiology, space optical communication, laser-induced material atomic fluorescence and UV absorption (such as fluorescence induction of Si atoms, freezing and control ) and the medical field also have broad application prospects. Especially in the field of industrial processing, due to the short wavelength and high photon energy of UV laser, its focused spot can be smaller, and high-energy...

AI Technical Summary

Problems solved by technology

[0004] To sum up, the above scheme has the following problems: the scheme of dual-wavelength resonance gain, the optical path structure and locked loop are very complicated, and the output light is unstable. As long as one wavelength loses the resonance condition, the output power will decrease, and the stability is very poor; two-stage The single-pass solution is limited by the damage threshold of the second-stage crystal, and can only output 50mW of power stably; the single-pass plus resonance solution is used to obtain high-power 355nm. Although there is only one locked loop, the optical path still needs single-pass frequency multiplication Adding two-stage nonlinear conversion of resonance and frequency, the optical path structure is not simple and compact, and it is also very difficult to adjust the coincidence of the optical path during the resonance and frequency process. As long as the overlap of the two paths of light is deflected or separated, the optical power will drop significantly.

However, the ultraviolet light generated by this method is mostly multi-mode laser, and the beam quality is not good, which cannot meet the needs of fine processing in industry

In addition, the system needs to use a large number of optical components with its own space, and the structure is complex, which increases the difficulty of debugging and is not conducive to industrial mass production

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