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Getter with thin film coating as well as preparation method and application of getter

A getter and coating technology, applied in chemical instruments and methods, coatings, sputtering coating, etc., can solve the problem of poor mechanical strength of compressed non-evaporable getters, difficulty in controlling the thickness of thin film coatings, and problems of getters Easy to be polluted and other problems, to achieve the effect of guaranteed life, stability and reliability, good absorption capacity, and improved sintering performance

Pending Publication Date: 2022-04-12
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, the mechanical strength of the compressed non-evaporable getter is poor
Although the porous sintered non-evaporable getter has higher mechanical strength and better getter performance than the pressed alloy, it still has the problem of high activation temperature. The activation temperature ranges from 500 to 900 °C. The use of electronic devices has certain limitations
In addition, the getter is easily oxidized in the atmospheric environment and has the disadvantage of short life.
[0005] The preparation of different thin film coatings on the surface of non-evaporable getters will improve the getter performance of the getters. In the prior art, getters with thin film coatings are mainly prepared by electroless plating. This preparation The thin-film coating method has the disadvantages that the getter is easily polluted and the thickness of the thin-film coating is difficult to control

Method used

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  • Getter with thin film coating as well as preparation method and application of getter
  • Getter with thin film coating as well as preparation method and application of getter
  • Getter with thin film coating as well as preparation method and application of getter

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] Such as figure 1 As shown, the present embodiment provides a getter (Zr-ZrVFe-Ni-1h) with a thin film coating, which is composed of a getter substrate 1 and a thin film coating 2 on its surface, and its preparation method is as follows:

[0048] (1) Preparation of ZrVFe alloy powder

[0049] According to the mass content of Zr, V and Fe are 70%, 24.6% and 5.4% respectively, the ZrVFe alloy ingot is smelted in a vacuum electric arc furnace, that is, the high-purity metal raw material is put into a copper crucible, and the argon gas with a purity of 99.999% is used Clean the melting chamber of the vacuum electric arc furnace 3 times, and then melt the metal raw materials 4 times. Then, under the protection of argon, the alloy ingot is crushed, vacuum ground, and sieved to obtain ZrVFe alloy powder with a particle size not higher than 75 μm.

[0050] (2) Preparation of getter substrate

[0051] Fully mix Zr powder and ZrVFe alloy powder at a mass ratio of 1:1, use a mol...

Embodiment 2

[0057] This example provides a getter (Zr-ZrVFe-Ni-1h) with a thin film coating, the preparation method of which is referred to Example 1, the only difference is that the deposition time of the Ni film is 2h.

[0058] The getter base material obtained by vacuum sintering in this embodiment has a porous structure, and the thickness of the thin-film coating Ni deposited by magnetron sputtering is 580 nm, showing a loose structure.

Embodiment 3

[0060] This example provides a getter (Zr-ZrVFe-Ni-3h) with a thin film coating, the preparation method of which is referred to Example 1, the only difference is that the deposition time of the Ni film is 3h.

[0061] The getter base material obtained by vacuum sintering in this embodiment has a porous structure, and the thickness of the Ni film coating deposited by magnetron sputtering is 860 nm, showing a relatively compact structure.

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Abstract

The invention provides a getter with a thin film coating as well as a preparation method and application of the getter, and relates to the field of new materials. The getter with the thin film coating comprises a getter base material and the thin film coating on the surface of the getter base material, raw materials of the getter base material comprise Zr powder and ZrVFe alloy powder, and the thin film coating is a Ni layer. The Ni layer can reduce the dissociation energy of H2 molecules on the surface of the getter, improves the getter performance of the getter, and can also effectively prevent oxidation of active gases such as O2 on a getter base material, so that the activation temperature of the getter is reduced. The getter with the thin film coating can be activated in the baking process of 300-450 DEG C, and damage to a device in the activation process can be well avoided. After being activated, the getter has good getter performance under the condition of room temperature, can absorb active gas in the electric vacuum device, provides the vacuum degree required after the device is sealed off, and ensures the service life, stability and reliability of the device.

Description

technical field [0001] The invention relates to the field of new materials, in particular to a getter with a thin film coating, a preparation method and application thereof. Background technique [0002] The getter can absorb the active gas in the electric vacuum device, provide the vacuum degree required after the device is sealed, and can maintain the vacuum degree for a long time to ensure the life, stability and reliability of the device, so the getter The research and development of the agent directly affect the performance of the electric vacuum device. [0003] Getters can be divided into evaporable getters and non-evaporable getters. The evaporable getters absorb air by forming a film after heating and evaporating, while the non-evaporable getters do not change their shape after activation and are stable at room temperature. It can form a stable compound with the active gas for inhalation. When the evaporative getter works, it will bring evaporative metal atoms, wh...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/16C23C14/35C22C16/00C22C1/08B22F3/11B01J20/28B01J20/02B01J20/32B01J20/30
Inventor 冯焱宋伊成永军孙雯君裴晓强邱云涛
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH