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MEMS resonant pressure sensor with on-chip in-situ temperature measurement compensation function

A pressure sensor and resonant technology, which is applied in the field of MEMS resonant pressure sensors, can solve the problems of large temperature hysteresis error of the sensor, difficulty in ensuring comprehensive accuracy, and long time to stabilize when power is turned on, so as to improve comprehensive accuracy, simple circuit, The effect of shortening the settling time

Pending Publication Date: 2022-05-13
BEIJING RES INST OF TELEMETRY +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] The MEMS sensitive chip of this type of sensor does not have the function of sensing its own temperature. The temperature-measuring diode on the PCB circuit board is used to sense the temperature. The temperature hysteresis error of the sensor is relatively large. It is difficult to guarantee the comprehensive accuracy in the environment of rapid temperature change. longer time

Method used

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  • MEMS resonant pressure sensor with on-chip in-situ temperature measurement compensation function
  • MEMS resonant pressure sensor with on-chip in-situ temperature measurement compensation function
  • MEMS resonant pressure sensor with on-chip in-situ temperature measurement compensation function

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Embodiment 1

[0060] Such as figure 1 As shown, a MEMS resonant pressure sensor with an on-chip in-situ temperature measurement and compensation function includes a sensitive chip A00, a closed-loop resonant detection circuit B00 electrically connected to the sensitive chip A00, and a temperature detection circuit C00;

[0061] The sensitive chip A00 is used for resonant sensing pressure and in-situ temperature sensing, the closed-loop resonance detection circuit B00 is used for closed-loop detection of the frequency sensed by the sensitive chip A00 to reflect the pressure sensed by the sensitive chip A00, and the temperature detection circuit C00 is used for The voltage sensed by the sensitive chip A00 is detected to reflect the temperature sensed by the sensitive chip A00 in situ.

Embodiment 2

[0063] Such as figure 1 As shown, a MEMS resonant pressure sensor with an on-chip in-situ temperature measurement and compensation function includes a sensitive chip A00, a closed-loop resonant detection circuit B00 electrically connected to the sensitive chip A00, and a temperature detection circuit C00;

[0064] The sensitive chip A00 is used for resonant sensing pressure and in-situ temperature sensing, the closed-loop resonance detection circuit B00 is used for closed-loop detection of the frequency sensed by the sensitive chip A00 to reflect the pressure sensed by the sensitive chip A00, and the temperature detection circuit C00 is used for Detecting the voltage sensed by the sensitive chip A00 to reflect the temperature sensed by the sensitive chip A00 in situ;

[0065] Such as Figure 2-3 As shown, the sensitive chip A00 includes Si pressure sensitive layer 100, SiO 2 Electrical isolation layer 200, Si resonator layer 300 and glass pit substrate layer 400;

[0066] T...

Embodiment 3

[0082] Such as figure 1 As shown, a MEMS resonant pressure sensor with on-chip in-situ temperature measurement and compensation function consists of three parts: a sensitive chip A00, a closed-loop resonant detection circuit B00, and a temperature detection circuit C00. The sensitive chip A00 is used for resonant sensing of pressure. The micro-nano structure and the micro-nano structure of resistance sensing temperature, the closed-loop resonant detection circuit B00 and the temperature detection circuit C00 are shared by the front-end resistor divider and voltage follower module circuit.

[0083] Such as figure 2 Shown is the top view of the sensitive chip of the sensor of the present invention, as image 3 Shown is the sectional view of the sensitive chip of the sensor of the present invention. It can be seen from the figure that the sensitive chip is composed of 4 layers, and the pressure sensitive layer 100 is SiO from top to bottom. 2 Electrical isolation layer 200, Si...

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Abstract

The invention provides an MEMS resonant pressure sensor with an on-chip in-situ temperature measurement compensation function. The MEMS resonant pressure sensor comprises a sensitive chip, a closed-loop resonance detection circuit and a temperature detection circuit, the micro-nano structure on the sensitive chip can sense the temperature while sensing the pressure, and the temperature data of the in-situ sensing chip is used for compensating and calculating the pressure data, so that the pressure sensor has higher precision and stability. According to the invention, an electrostatic driving-piezoresistive detection principle mode is adopted, a piezoresistive sensitive structure on the sensitive chip is combined with an external detection circuit on the premise of not increasing the complexity and difficulty of the design and micro-nano manufacturing process, the detected alternating current information (frequency) is used for sensing pressure, and the detected direct current information (voltage) is used for sensing temperature; the temperature information is the temperature of the sensitive chip, the temperature hysteresis error of the sensor can be better reduced through compensation calculation, the comprehensive precision in a rapid temperature changing environment is improved, and the power-on start-up stable time is shortened.

Description

technical field [0001] The invention relates to the technical field of measurement and testing, in particular to a MEMS resonant pressure sensor with an on-chip in-situ temperature measurement and compensation function. Background technique [0002] High-precision, high-stability, and high-reliability pressure sensors are used in large aircraft and advanced fighter air data systems, aero-engine gas-liquid pipeline measurement and control systems, pressure monitoring and control in space stations and deep space probes, submarines and deep sea The pressure measurement in the cabin of submarines, the pressure monitoring of aerospace and missile weapons, the pressure monitoring of nuclear power water vapor pipelines, the pressure monitoring of oil and gas pipeline networks, meteorological monitoring, process industry and other fields have a wide range of application scenarios. The resonant pressure sensor is the one with the highest comprehensive accuracy, the best temperature s...

Claims

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Application Information

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IPC IPC(8): G01L1/10G01L1/20G01L1/26G01L9/02G01L19/04
CPCG01L1/10G01L1/20G01L1/26G01L9/02G01L19/04
Inventor 焦海龙王健杨挺郭伟龙陈家林陈昱璠
Owner BEIJING RES INST OF TELEMETRY
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