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Method for preparing composite film on surface of precious metal, composite film and precious metal

A composite film and precious metal technology, applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., can solve the problem of poor anti-corrosion performance of precious metals, achieve good anti-corrosion performance of precious metals, not easy to oxidize or dissolve, stable effect

Pending Publication Date: 2022-07-01
中国金币集团有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The application provides a method for preparing a composite film on the surface of a precious metal, a composite film and a precious metal, so as to solve the technical problem that the anti-corrosion performance of the precious metal surface film layer in the prior art is not strong

Method used

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  • Method for preparing composite film on surface of precious metal, composite film and precious metal
  • Method for preparing composite film on surface of precious metal, composite film and precious metal
  • Method for preparing composite film on surface of precious metal, composite film and precious metal

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Embodiment

[0091] S1. Set the first deposition parameters of the deposition chamber as: film growth temperature: 150°C to 250°C; background pressure -3 torr; process pressure: 10 -2 torr~1torr; gas flow: 0sccm~100sccm; dosage of each precursor: 80ms~10 4 ms; carrier gas purge time: 10s~100s; growth thickness: 7nm~14nm;

[0092] S2. Passing the aluminum-containing precursor Al(Me) into the deposition chamber 3 , depositing an aluminum-containing precursor on the surface of the substrate under the first deposition parameters to obtain an aluminum layer;

[0093] S3. Pour nitrogen into the deposition chamber to remove the aluminum-containing precursor in the deposition chamber.

[0094] S4. Set the first reaction parameters of the deposition chamber as: film growth temperature: 150°C to 250°C; background pressure -3 torr; process pressure: 10 -2 torr~1torr; gas flow: 0sccm~100sccm; dosage of each precursor: 80ms~10 4 ms; carrier gas purge time: 10s~100s; growth thickness: 7nm~14nm;

[...

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Abstract

The invention particularly relates to a method for preparing a composite film on the surface of precious metal, the composite film and the precious metal, and belongs to the field of atomic layer deposition. Depositing a second precursor on the surface of the first deposition film to obtain a second deposition film; wherein the first precursor comprises an oxygen-containing precursor and an aluminum-containing precursor, and the second precursor comprises an oxygen-containing precursor and a titanium-containing precursor. The first precursor is firstly deposited on the substrate to obtain the first deposition film, the surface of the first deposition film is compact and can be well attached to the surface of precious metal, then the second precursor is deposited on the surface of the first deposition film to obtain the second deposition film, and the second deposition film is more stable in property and not prone to being oxidized or dissolved. The first deposition film enhances the adhesive force and compactness of the composite film, and the second deposition film enhances the chemical stability and physical stability of the composite film, so that the composite film has good precious metal corrosion resistance and scratch resistance.

Description

technical field [0001] The present application relates to the field of atomic layer deposition, and in particular, to a method for preparing a composite film on the surface of a precious metal, the composite film and the precious metal. Background technique [0002] Precious metals are expensive, most have beautiful colors, and many are used to make jewelry and souvenirs. Most of them are relatively stable in chemical properties and generally do not react chemically with other external substances. However, in the production process, other metal impurities will inevitably be mixed. [0003] If the precious metal contains aluminum, the aluminum on the surface will dissolve due to perspiration, resulting in discoloration. If the precious metal contains silver element, it reacts with gas molecules in the air and changes color to form black silver sulfide. If the precious metal contains mercury, a white gold-mercury compound may be produced. The above-mentioned metal impuriti...

Claims

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Application Information

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IPC IPC(8): C23C16/40C23C16/455
CPCC23C16/403C23C16/405C23C16/45527
Inventor 姚国华刘星海李扬李钢王浙加李明夏洋冯嘉恒
Owner 中国金币集团有限公司
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