Method for preparing composite film on surface of precious metal, composite film and precious metal
A composite film and precious metal technology, applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., can solve the problem of poor anti-corrosion performance of precious metals, achieve good anti-corrosion performance of precious metals, not easy to oxidize or dissolve, stable effect
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[0091] S1. Set the first deposition parameters of the deposition chamber as: film growth temperature: 150°C to 250°C; background pressure -3 torr; process pressure: 10 -2 torr~1torr; gas flow: 0sccm~100sccm; dosage of each precursor: 80ms~10 4 ms; carrier gas purge time: 10s~100s; growth thickness: 7nm~14nm;
[0092] S2. Passing the aluminum-containing precursor Al(Me) into the deposition chamber 3 , depositing an aluminum-containing precursor on the surface of the substrate under the first deposition parameters to obtain an aluminum layer;
[0093] S3. Pour nitrogen into the deposition chamber to remove the aluminum-containing precursor in the deposition chamber.
[0094] S4. Set the first reaction parameters of the deposition chamber as: film growth temperature: 150°C to 250°C; background pressure -3 torr; process pressure: 10 -2 torr~1torr; gas flow: 0sccm~100sccm; dosage of each precursor: 80ms~10 4 ms; carrier gas purge time: 10s~100s; growth thickness: 7nm~14nm;
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