Wafer cyanide-free electrogilding liquid medicine formula and preparation method thereof
A technology of electroplating gold and liquid medicine, applied in the field of electroplating gold, can solve the problems of poor practicability, affecting the use effect of cyanide-free gold electroplating liquid on wafers, incomplete dissolution of organic additives and inorganic additives, etc., and achieves high practicability and progress. The effect of remarkable property and improving the dissolution effect
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Embodiment 1
[0030] see figure 1 , a formula of a cyanide-free gold electroplating solution for wafers, wherein the cyanide-free gold electroplating solution includes the following components in parts by weight:
[0031] 78 parts of N,N-dimethylethanolamine, 12 parts of main complexing agent, 6 parts of auxiliary complexing agent, 2 parts of potassium gold chloride, 23 parts of ultrapure water, 25 parts of potassium carbonate, 9 parts of additional additives, potassium tartrate 5 parts, 1 part phenylalanine.
[0032] In this embodiment, the resistivity of the ultrapure water is 18.25 MΩ / cm, and the pH value of the cyanide-free gold electroplating solution is between 8 and 11 to ensure the quality of the ultrapure water.
[0033] In this embodiment, the primary complexing agent includes any one or two combinations of hydantoin derivatives, sodium pyrophosphite and 5,5-dimethylhydantoin.
[0034] In this embodiment, the auxiliary complexing agent is one or two of potassium oxalate, polyacr...
Embodiment 2
[0049] see figure 1 , a formula of a cyanide-free gold electroplating solution for wafers, wherein the cyanide-free gold electroplating solution includes the following components in parts by weight:
[0050] 80 parts of N,N-dimethylethanolamine, 15 parts of main complexing agent, 6 parts of auxiliary complexing agent, 2 parts of potassium gold chloride, 23 parts of ultrapure water, 30 parts of potassium carbonate, 15 parts of additional additives, potassium tartrate 5 parts, 1 part phenylalanine.
[0051] In this embodiment, the resistivity of the ultrapure water is 18.25 MΩ / cm, and the pH value of the cyanide-free gold electroplating solution is between 8 and 11 to ensure the quality of the ultrapure water.
[0052] In this embodiment, the primary complexing agent includes any one or two combinations of hydantoin derivatives, sodium pyrophosphite and 5,5-dimethylhydantoin.
[0053] In this embodiment, the auxiliary complexing agent is one or two of potassium oxalate, polyac...
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Abstract
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