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Focusing type vertical grating coupler and preparation method thereof

A vertical grating and focusing grating technology, applied in the direction of instruments, light guides, optics, etc., can solve the problems of small coupling tolerance and low coupling efficiency, and achieve the effect of enhancing interference, improving coupling efficiency, and increasing coupling light source

Pending Publication Date: 2022-07-29
WUHAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to solve the problems of small coupling tolerance and low coupling efficiency of the existing grating coupler, and provide a focusing type vertical grating coupler with a lens. The light in the single-mode fiber passes through the focusing lens and then Coupled to the diffraction grating with a fan-shaped structure, due to the focusing effect of the lens, the coupling of the light from the optical fiber and the focusing grating coupler can be enhanced, thereby improving the coupling efficiency of the grating coupler, and the lens structure above the cladding layer can increase Coupling tolerance when it is coupled with fiber

Method used

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  • Focusing type vertical grating coupler and preparation method thereof
  • Focusing type vertical grating coupler and preparation method thereof
  • Focusing type vertical grating coupler and preparation method thereof

Examples

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Embodiment 1

[0029] Example 1: as Figure 1 to Figure 4 As shown, this embodiment provides a focusing vertical grating coupler, which is manufactured based on an SOI substrate, and the SOI substrate sequentially includes a silicon substrate layer 1 , a silicon dioxide buried oxide layer 2 and a top silicon layer 3 from bottom to top , a top silicon waveguide layer 6 is etched on the top silicon layer 3, and the top silicon waveguide layer 6 is composed of a fan-shaped focusing grating waveguide structure 61 and a strip-shaped waveguide structure 62 connected to the fan-shaped focusing grating waveguide structure 61. The focusing grating waveguide structure 61 is covered with a polysilicon layer 8, the polysilicon layer 8 and the top silicon waveguide layer 6 around it are covered with a silicon dioxide cladding layer 4, and the top of the silicon dioxide cladding layer 4 is provided with a fan-shaped focusing grating waveguide. The position of the structure 61 corresponds to the focusing c...

Embodiment 2

[0036] Example 2: as Figure 5 As shown, this embodiment provides a preparation method of the focusing vertical grating coupler, which is characterized by comprising the following steps:

[0037] step 1, Figure 5 As shown in a, prepare the SOI substrate, and clean the top silicon layer 3;

[0038] Step 2. Figure 5 As shown in b, polysilicon is deposited on the top silicon layer 3 to form a polysilicon layer 8;

[0039] Step 3. Figure 5 As shown in c, the photoresist 7 is uniformly coated on the polysilicon layer 8;

[0040] Step 3. Figure 5As shown in d, according to the size and shape of the fan-shaped focusing grating waveguide structure 61 and the strip-shaped waveguide structure 62, the photoresist 7 is exposed by the laser direct writing 3D grayscale lithography technology, and then developed to obtain the photoresist layer focusing Grating waveguide structure pattern 9;

[0041] Step 4. Figure 5 As shown in e, by reactive ion etching, the photoresist layer f...

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Abstract

The invention discloses a focusing type vertical grating coupler and a preparation method thereof, a fan-shaped focusing grating structure is located on a top silicon layer at the top of an SOI substrate, and the top silicon waveguide layer comprises a fan-shaped focusing grating waveguide structure and a strip-shaped waveguide structure. During preparation, a layer of polycrystalline silicon is deposited on the top silicon layer; then coating a photoresist; exposing and developing the photoresist to obtain a photoresist layer focusing grating waveguide structure pattern; transferring the pattern of the focusing grating waveguide structure of the photoresist layer to the top silicon layer through reactive ion etching to obtain a fan-shaped focusing grating waveguide structure and a strip-shaped waveguide structure; depositing a silicon dioxide coating layer on the top silicon waveguide layer; and etching a focusing convex lens on the silicon dioxide coating layer above the fan-shaped focusing grating waveguide structure to obtain the focusing type vertical grating coupler with the lens. The structure of the vertical grating coupler is changed, the coupling light source is enlarged, the interference of diffraction light on the grating is enhanced, and the alignment tolerance and the coupling efficiency are improved.

Description

technical field [0001] The invention belongs to the field of optical fiber couplers, relates to a silicon-based optical interconnection technology in integrated optics, and more particularly, relates to a focusing vertical grating coupler and a preparation method thereof. Background technique [0002] In order to apply SOI submicron waveguides to practical communication systems on a large scale, the coupling problem between optical fibers and waveguides must be solved. The difficulty of coupling between optical fiber and waveguide lies in the large difference in the cross-sectional size of the two. If the single-mode fiber is directly butt-coupled with the single-mode silicon-based waveguide, a huge coupling loss will be generated, including the lateral dislocation loss between the fiber and the waveguide, Longitudinal spacing loss, axial angle tilt loss, mode field matching loss, numerical aperture difference loss, etc. The application of grating coupler is a solution to t...

Claims

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Application Information

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IPC IPC(8): G02B6/124G02B6/136G02B6/13
CPCG02B6/124G02B6/1245G02B6/13G02B6/136G02B2006/12102G02B2006/12107G02B2006/12085G02B2006/12147
Inventor 李晓宇于圣韬桂成群宋毅
Owner WUHAN UNIV
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