Preparation process of sputtered rotary molybdenum-sodium-alloy tubular target

A preparation process and alloy technology, which is applied in the field of preparation process of molybdenum-sodium alloy rotary sputtering tubular target, can solve the problems of no production, etc., achieve the effect of changing the grain structure, simple manufacturing process, and increasing density

Active Publication Date: 2013-04-17
LUOYANG SIFON ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Molybdenum-sodium alloy rotary sputtering tubular targets required for CIGS photovoltaic cells, especially tube targets with uniform composition, no segregation, fine grains, and high purity, have not yet been produced.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] 1) Material preparation: The powder used is molybdenum powder and sodium molybdate powder. The physical properties of the powder are: Mo content of molybdenum powder ≥99.95%, particle size 3.4μm; sodium molybdate powder, sodium molybdate content ≥99.0%, particle size 23μm.

[0047] 2) Powder blending: Weigh molybdenum powder and sodium molybdate powder according to the proportion, the mass percentage of molybdenum powder is 97%, and sodium molybdate powder is 3%.

[0048] 3) Mechanical alloying: Mechanical alloying is the use of high-energy ball milling, crushing, cold welding and low-temperature solid-state reaction under the action of mechanical force to synthesize nano-molybdenum-sodium alloy powder. Usually, molybdenum powder and sodium molybdate powder are mixed in proportion, ball-milled in a planetary high-energy ball mill, and the energy is adjusted by an external magnetic field. Ball milling was carried out under argon protection. The ball-to-material ratio i...

Embodiment 2

[0074] 1) Material preparation: The powder used is molybdenum powder and sodium molybdate powder. The physical properties of the powder are: Mo content of molybdenum powder ≥99.95%, particle size 5μm; sodium molybdate powder, sodium molybdate content ≥99.0%, particle size 35μm.

[0075] 2) Powder blending: Weigh molybdenum powder and sodium molybdate powder according to the proportion, the mass percentage of molybdenum powder is 99%, and sodium molybdate powder is 1%.

[0076] 3) Mechanical alloying: Mechanical alloying is the use of high-energy ball milling, crushing, cold welding and low-temperature solid-state reaction under the action of mechanical force to synthesize nano-molybdenum-sodium alloy powder. Usually, molybdenum powder and sodium molybdate powder are mixed in proportion, ball-milled in a planetary high-energy ball mill, and the energy is adjusted by an external magnetic field. Ball milling was carried out under argon protection. The ball-to-material ratio is ...

Embodiment 3

[0102] 1) Material preparation: The powder used is molybdenum powder and sodium molybdate powder. The physical properties of the powder are: Mo content of molybdenum powder ≥99.95%, particle size 3μm; sodium molybdate powder, sodium molybdate content ≥99.0%, particle size 20μm.

[0103] 2) Powder blending: Weigh molybdenum powder and sodium molybdate powder according to the proportion, the mass percentage of molybdenum powder is 90%, and sodium molybdate powder is 10%.

[0104] 3) Mechanical alloying: Mechanical alloying is the use of high-energy ball milling, crushing, cold welding and low-temperature solid-state reaction under the action of mechanical force to synthesize nano-molybdenum-sodium alloy powder. Usually, molybdenum powder and sodium molybdate powder are mixed in proportion, ball-milled in a planetary high-energy ball mill, and the energy is adjusted by an external magnetic field. Ball milling was carried out under argon protection. The ball-to-material ratio is...

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Abstract

The invention discloses a preparation process of a sputtered rotary molybdenum-sodium-alloy tubular target. The preparation process comprises the following steps of: (1) preparing materials, wherein used powder comprises molybdenum powder and sodium molybdate powder, the physical property of the powder is as follows: the Mo content of the molybdenum powder is at least 99.95% with the granularity of 3-5 microns, and the sodium molybdate content of the sodium molybdate powder is at least 99.0% with the granularity of 20-40 microns; (2) blending the powder: weighing the molybdenum powder and the sodium molybdate powder proportionately, controlling the mass percentage content of the molybdenum powder to be 90-99% and that of the sodium molybdate powder to be 1-10%; (3) carrying out mechanical alloying: synthesizing nanometer molybdenum-sodium alloy powder; (4) filling into a die; (5) carrying out cold isostatic pressing; (6) sintering; (7) forging; (8) performing vacuum annealing; and (9) mechanically processing to obtain the sputtered rotary molybdenum-sodium-alloy tubular target. A produced molybdenum-niobium-alloy tubular target has characteristics of uniform elements, no segregation, fine grain size and high purity, completely meets requirements of CIGS (Copper Indium Gallium Selenide) photovoltaic cells and increases the use efficiency of the cells.

Description

technical field [0001] The invention relates to a production technology of a molybdenum-sodium alloy tubular target, in particular to a preparation process of a molybdenum-sodium alloy rotary sputtering tubular target suitable for photovoltaic solar energy and semiconductor film rotary sputtering coating production lines. Background technique [0002] Molybdenum-sodium alloy materials are used in the production of photovoltaic cells due to their excellent electrical conductivity, oxidation resistance and low coating stress, specifically referring to the absorber layer of high-efficiency polycrystalline thin-film photovoltaic cells, commonly known as CIGS photovoltaic cells. It has been proved that molybdenum-sodium alloy coating materials can play a role in improving the efficiency of CIGS photovoltaic cells. [0003] In order to improve the utilization rate of the target, people are increasingly manufacturing and using tubular targets, that is, the target is made into a tub...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22C27/04C22C1/04B22F3/16C23C14/14C23C14/34
Inventor 赵文普高建杰
Owner LUOYANG SIFON ELECTRONICS
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