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Patterned flexible sensor prepared by femtosecond and nanosecond laser and preparation method thereof

A flexible sensor and patterning technology, applied in photovoltaic power generation, final product manufacturing, printed circuit manufacturing, etc., can solve the problems of light transmission performance increase, light transmission performance decline, conductive performance decline, etc., to achieve good and excellent light transmission performance The effect of electrical properties

Pending Publication Date: 2022-08-09
WUHAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, when the thickness of Ag nanowires increases, its electrical conductivity increases and its light transmission performance decreases; when the thickness of Ag nanowires decreases, its electrical conductivity decreases and its light transmission performance increases. contradiction

Method used

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  • Patterned flexible sensor prepared by femtosecond and nanosecond laser and preparation method thereof
  • Patterned flexible sensor prepared by femtosecond and nanosecond laser and preparation method thereof
  • Patterned flexible sensor prepared by femtosecond and nanosecond laser and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0034] like figure 1 As shown, a method for preparing a patterned transparent conductive film by laser provided in this embodiment specifically includes the following steps:

[0035] S1-1. Use a pipette to transfer 0.5 mg of curing agent 1 into a plastic cup 2 containing 7.5 mg of PDMS monomer 3, and stir well to make the curing agent 1 and PDMS monomer 3 fully mixed (the PDMS monomer and cured All agents belong to Dow Corning 184PDMS glue);

[0036] S1-2. Place the plastic cup 2 together with the well-mixed curing agent 1 and PDMS 3 in the reaction tower 4 to remove the air bubbles in the mixed solution;

[0037] S1-3. Spin-coat the bubble-free PDMS mixture 5 onto the clean silicon wafer 6, set the rotation speed of the silicon wafer to be 500 rpm, and the spin-coating time to be 120 s;

[0038] S1-4. After the spin coating is completed, put the silicon wafer 6 coated with the PDMS mixed solution 5 into the vacuum oven 7 . Set the vacuum oven temperature to 100°C and the b...

Embodiment 2

[0047] like figure 1 As shown, a method for preparing a patterned transparent conductive film by laser provided in this embodiment specifically includes the following steps:

[0048] S1-1. Use a pipette to transfer 0.6 mg of curing agent 1 into a plastic cup 2 containing 7.2 mg of PDMS monomer 3, and stir well to fully mix curing agent 1 and PDMS monomer 3 (the PDMS monomer and cured All agents belong to Dow Corning 184PDMS glue);

[0049] S1-2. Place the plastic cup 2 together with the well-mixed curing agent 1 and PDMS 3 in the reaction tower 4 to remove the air bubbles in the mixed solution;

[0050] S1-3. Spin-coat the bubble-free PDMS mixture 5 onto the clean silicon wafer 6, set the rotation speed of the silicon wafer to be 600 rpm, and the spin-coating time to be 100 s;

[0051] S1-4. After the spin coating is completed, put the silicon wafer 6 coated with the PDMS mixed solution 5 into the vacuum oven 7 . Set the temperature of the vacuum oven to 100°C and the bakin...

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Abstract

The invention discloses a patterned flexible sensor prepared by femtosecond and nanosecond laser and a preparation method thereof. The preparation method comprises the following steps: 1) mixing a polydimethylsiloxane (PDMS) monomer and a curing agent, and spin-coating to prepare a transparent and flexible PDMS substrate; (2) irradiating the PDMS substrate by using oxygen plasma (Plasma); 3) spin-coating silver nanowire slurry on the substrate; 4) applying pressure to the silver nanowire slurry; 5) scanning the silver nanowire slurry on the PDMS substrate by femtosecond laser; (6) nanosecond laser melting is conducted, redundant silver nanowires are beaten away, and a pattern is drawn; and 7) spin-coating PDMS, and packaging the patterned silver nanowire slurry. The method provided by the invention is high in preparation speed and high in precision. The prepared sensor is soft in texture and has excellent light transmission performance and tensile performance.

Description

technical field [0001] The invention belongs to the field of application research of electronic devices, and in particular relates to a femtosecond, nano-laser preparation patterned, high-conductivity, high-light-transmitting stretchable flexible sensor and a preparation method thereof. Background technique [0002] Ag nanowire networks have excellent optical, electrical, and mechanical properties, which are widely used in flexible and stretchable electrodes, and have great potential applications in the fields of disease diagnosis, health monitoring, and sports. [0003] However, when the thickness of Ag nanowires increases, its electrical conductivity improves, and its light transmission performance decreases; when the thickness of Ag nanowires decreases, its electrical conductivity decreases, and its light transmission performance increases. contradiction. SUMMARY OF THE INVENTION [0004] In order to solve the above technical problems, the purpose of the present invent...

Claims

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Application Information

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IPC IPC(8): H05K3/02H05K1/02
CPCH05K3/022H05K3/027H05K1/0283Y02P70/50
Inventor 桂成群赵强杨柏松薛龙建陶国裔鲁才
Owner WUHAN UNIV
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