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Reinforced heat radiation type chip down embedded ball type array carrying board structure and making method thereof

A manufacturing method and heat-dissipating technology, applied in semiconductor/solid-state device manufacturing, semiconductor/solid-state device parts, semiconductor devices, etc., can solve problems such as unreachable, high I/O packaging density, and additional design of heat dissipation and cooling structures

Inactive Publication Date: 2005-09-07
KINSUS INTERCONNECT TECH SUZHOU CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Due to the trend of thin and small electronic products, coupled with the continuous increase in functions, and the continuous increase in the functions of electronic products, the number of I / Os of ICs in electronic products has increased rapidly, so its relative packaging technology must also be constantly improved. Updated to meet actual needs, so in line with the rise of flip-chip packaging with the latest technology in high-end products, the ball grid array (BGA) with high I / O density has become the mainstream in today's packaging technology, so many high-power ICs also use Ball grid array (BGA) packaging process, but the I / O packaging density of the ball grid array (BGA) is higher than other packaging methods, so that many high-power ICs will accumulate a lot of heat for a long time, and must be additionally Only by designing a heat dissipation and cooling structure can the normal operation of high-power IC functions be maintained
[0003] Known ways to improve the heat dissipation of high-power ICs are to attach fin-type heat sinks to the back of ceramics or organic substrate chips, and to provide some BGA packaging structures with heat dissipation effects. However, due to these known methods, Both require an additional manufacturing process, which increases the cost of the package, and the chip is not directly in contact with the heat dissipation fins, so that the heat dissipation effect is not good
In addition, the SUPER BGA launched by AmKor / AnAm, the world's largest packaging factory, and the USTAR BG of Texas Instruments (IT) are similarly designed with HEAT SINK and embedded downwards, trying to enhance their heat dissipation effect. They are basically BT materials. PBGA, and use mechanical drilling as the via hole (aperture ф250μm), and need to pull electroplated nickel / gold conductive wire, but still can not achieve the laser drill micro via hole (aperture ф50- -ф150μm) capacity

Method used

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  • Reinforced heat radiation type chip down embedded ball type array carrying board structure and making method thereof
  • Reinforced heat radiation type chip down embedded ball type array carrying board structure and making method thereof
  • Reinforced heat radiation type chip down embedded ball type array carrying board structure and making method thereof

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Embodiment Construction

[0043] The invention provides a method for manufacturing a laser-drilled hole-enhanced heat-dissipating chip embedded in a downward-facing ball array carrier, such as Figure 1A-Figure 1T shown, including the following steps:

[0044] In the step of providing a first substrate, a second metal layer 102 and a third metal layer 103 are pre-formed on the upper and lower surfaces of the first substrate 101, as shown in FIG. Bismaleimide triazine (BT) dielectric material or other organic materials can even be inorganic ceramic materials, with a thickness of about 60--300 μm, and the second metal layer 102 and the third metal layer 103 The material can be copper with a thickness of about 12 μm. Before etching the second metal layer 102, the second metal layer 102 and the third metal layer 103 can be thinned, as shown in Figure 1(B), the thinned thickness is about 9 μm, and then dry The method of image transfer of film 104, as shown in Figure 1 (C), etches the second metal layer to...

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Abstract

This invention discloses a strengthening radiation chip embedded downward ball array load plate structure and process method on the bases of method panting plates to meet the needs of matching IC package wieh mtal panting plates, thickness of which is flexiblly adjusted to provide a support angle plate, wane and increases operation of radiation power design. The surface process technology of plating nickel / gold can be used for this invented structure design in which wiring design of not using plating conducting wire to plate gold on full plate process of wireless plate nickel / gold surface process techonlogy and using the way of drilling microdown hole to make lead holes by nicreasing layer by laser to reduce wiring space of laser plate wire.

Description

technical field [0001] The invention relates to a structure and a manufacturing method of a chip facing down ball array carrier plate used in semiconductor packaging technology to strengthen heat dissipation by laser drilling, which can solve the problem of heat dissipation and cooling of IC packaging, and interference noise and noise caused by backtracking signals at the end of electroplating wires. Issues that add additional I / O layout requirements. Background technique [0002] Due to the trend of thin and small electronic products, coupled with the continuous increase in functions, and the continuous increase in the functions of electronic products, the number of I / Os of ICs in electronic products has increased rapidly, so its relative packaging technology must also be constantly improved. Updated to meet actual needs, so in line with the rise of flip-chip packaging with the latest technology in high-end products, the ball grid array (BGA) with high I / O density has becom...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/48H01L21/60H01L23/12
CPCH01L24/24H01L2224/24H01L2924/00012
Inventor 张谦为黄胜川
Owner KINSUS INTERCONNECT TECH SUZHOU CORP
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