Reinforced heat radiation type chip down embedded ball type array carrying board structure and making method thereof
A manufacturing method and heat-dissipating technology, applied in semiconductor/solid-state device manufacturing, semiconductor/solid-state device parts, semiconductor devices, etc., can solve problems such as unreachable, high I/O packaging density, and additional design of heat dissipation and cooling structures
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[0043] The invention provides a method for manufacturing a laser-drilled hole-enhanced heat-dissipating chip embedded in a downward-facing ball array carrier, such as Figure 1A-Figure 1T shown, including the following steps:
[0044] In the step of providing a first substrate, a second metal layer 102 and a third metal layer 103 are pre-formed on the upper and lower surfaces of the first substrate 101, as shown in FIG. Bismaleimide triazine (BT) dielectric material or other organic materials can even be inorganic ceramic materials, with a thickness of about 60--300 μm, and the second metal layer 102 and the third metal layer 103 The material can be copper with a thickness of about 12 μm. Before etching the second metal layer 102, the second metal layer 102 and the third metal layer 103 can be thinned, as shown in Figure 1(B), the thinned thickness is about 9 μm, and then dry The method of image transfer of film 104, as shown in Figure 1 (C), etches the second metal layer to...
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