Fibre-optical probe with excellent vibration characteristic and producing method thereof
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- UNIV OF SCI & TECH OF CHINA
- Publication Date
- 2004-07-07
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
Technical field:
[0001] The invention relates to a scanning optical microscopic imaging technology, in particular to an imaging component provided by a scanning near-field optical microscope in the near-field optical experimental technology and a manufacturing method thereof. Background technique:
[0002] Near-field optical microscopy (abbreviated as NSOM) performs optical measurements at distances much smaller than a wavelength (i.e., in the near-field) to obtain super-diffraction-limited spatial resolution. The current near-field optical microscope uses a melted or corroded optical fiber, and coats it with a metal film to form an optical aperture with a diameter of 10nm to 100nm at the end as an optical probe, which can be installed on a precision displacement and scanning probe. On the piezoelectric ceramic material, combined with the highly accurate feedback control provided by atomic force microscopy (AFM), the optical probe is very precisely controlled at a height of ...