Preparation of single crystalline cerium oxide powder

A cerium oxide, cerium hydroxide technology, applied in chemical instruments and methods, cerium oxide/cerium hydroxide, lanthanide oxide/hydroxide, etc., can solve problems such as energy consumption

Inactive Publication Date: 2004-08-18
LG CHEM LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] However, cerium oxide particles synthesized by such a mechanochemical process contain a large amount of sodium, which is a deadly pollutant in semiconductor processing, so additional elution work is unavoidable
In addition, due to the coagulation and crystallization of the calcination process, a large amount of energy is consumed when grinding to form nano-sized particles

Method used

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  • Preparation of single crystalline cerium oxide powder
  • Preparation of single crystalline cerium oxide powder
  • Preparation of single crystalline cerium oxide powder

Examples

Experimental program
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example

[0042] The method of hydrothermally synthesizing ceramic powder includes mixing and dispersing of raw materials, performing hydrothermal reaction in a suitable reactor, and cleaning and drying.

[0043] The reaction equipment used in the present invention is a 100 ml, 2 liter and 2 gallon autoclave and is operated using their respective force or mechanical force. Hot distilled water and alcohol were used to wash the reaction product, and after washing and filtering, the reaction product was dried in a drying oven at 100° C. for 5 hours or more. The dried powder was observed with an XRD (X-ray diffraction) analysis device to determine crystallinity and degree of crystallinity, and the dry powder was observed through an electron microscope to determine the shape and size of particles. figure 1 It is the result of XRD analysis of cerium oxide prepared according to the method of the present invention. exist figure 1 In , the ordinate represents the X-ray intensity, and the absci...

example 1

[0048] 0.04 moles of cerium nitrate (produced by Aldrich, with a purity of 99%) were dissolved in a mixed solution of 200 milliliters of distilled water and 100 milliliters of ethylene glycol, and then 160 milliliters of 0.5 M NaOH aqueous solution was added to precipitate cerium hydroxide at 50° C. . The precipitated hydroxide was washed with distilled water, and then dispersed in distilled water so that the total solution volume became 100 ml.

[0049] Take 10 milliliters of the precipitated hydroxide solution and disperse it in 10 milliliters of distilled water, carry out hydrothermal reaction for 12 hours at a stirring speed of 200 rpm and a temperature of 230° C. Therefore, the average particle size is spherical or boat-shaped cerium oxide of 80 nanometers is synthesized. SEM photographs of cerium oxide as image 3 shown. The magnification of the SEM photograph is 100,000 times, and the length of the calibration line shown represents 100 nanometers.

example 2

[0051] 0.06 mole of cerium nitrate (produced by Aldrich, purity 99%) was dissolved in a mixed solution of 100 ml of distilled water and 200 ml of butanol, and then 200 ml of 0.5 M KOH aqueous solution was added to precipitate cerium hydroxide at 50° C. The precipitated hydroxide was washed with distilled water, and then dispersed in distilled water so that the volume of the solution became 100 ml.

[0052] Take 20 ml of the precipitated hydroxide solution and disperse it in 10 ml of distilled water, and carry out a hydrothermal reaction for 12 hours at a stirring speed of 300 rpm and a temperature of 230° C. Spherical or boat-shaped cerium oxide with an average particle size of 30 to 80 nm was synthesized. SEM photographs of cerium oxide as Figure 4 shown. The magnification of the SEM photograph is 100,000 times, and the length of the calibration line shown represents 100 nanometers.

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Abstract

The present Invention relates to a method for preparing single crystalline cerium oxide nanopowder capable of easily controlling the shape and granularity of particles. The method includes preparing cerium hydroxide by precipitating a cerium salt in the presence of a solvent mixture of organic solvent and water and hydrothermally reacting the prepared cerium hydroxide. The prepared single crystalline cerium oxide has a particle size of not less than about 30 nm and an excellent degree of dispersion.

Description

technical field [0001] The present invention relates to the preparation of cerium oxide (CeO 2 ) nanoparticle method, in particular, relates to the preparation of single crystal cerium oxide nanopowder which is difficult to be synthesized by conventional hydrothermal reaction, the particle size is not less than about 30 nanometers, and the shape and size are uniformly distributed and can be produced at low temperature method. Background technique [0002] Cerium oxide (CeO 2 ) powder has multiple functions and can be used as abrasive, catalyst and fluorescent material, etc. With the development of the semiconductor industry, cerium oxide powder has attracted much attention as the main component of the slurry used in the CMP (Chemical Mechanical Polishing) process of semiconductor production. [0003] In cerium oxide (CeO 2 ) powder applications, there is an urgent need to synthesize fine, uniform and round cerium oxide (CeO 2 ) powder, but there is no special method to ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01F17/235
CPCC01F17/0043C01P2004/10C01P2002/72C01P2004/30C01P2004/64B82Y30/00C01P2004/03C01P2004/52C01P2004/62C01F17/235B82Y40/00C01P2004/32
Inventor 鲁埈硕权泰贤曹升范洪惠贞韩大坤
Owner LG CHEM LTD
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