Ag/TiO2 composite film with adjustable contact angle and preparation method thereof

A composite film and contact angle technology, applied in ion implantation plating, metal material coating process, coating, etc., can solve the problem that the sol is easy to become loose, which is not conducive to the preparation of a large-area uniform film, and the film and the substrate are not well bonded And other issues

Inactive Publication Date: 2004-12-29
TSINGHUA UNIV
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

Among these methods, the sol-gel method is not conducive to the preparation of large-area uniform films, and the sol tends to become loose during heat treatment, so the combination of the film and the substrate is not good enough
The electrochemical oxidation method limits the deposition substrate of the film, which is not conducive to the wider utilization of the film, especially in occasions such as windshield glass and eye glass that require a high transmittance of the substrate

Method used

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  • Ag/TiO2 composite film with adjustable contact angle and preparation method thereof
  • Ag/TiO2 composite film with adjustable contact angle and preparation method thereof
  • Ag/TiO2 composite film with adjustable contact angle and preparation method thereof

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Experimental program
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Effect test

Embodiment 1

[0025] 1) Take glass sheet as the carrier, after cleaning, put it into the vacuum coating equipment with pure metal titanium target, the background vacuum is 3.0×10 -3 Pa;

[0026] 2) Using intermediate frequency reactive magnetron sputtering technology:

[0027] The frequency of the intermediate frequency AC arc suppression power supply is 25Hz, the working voltage is 300V, and the current density is 2mA / cm 2 , the working gas is 99.99% high-purity argon, and its pressure is 2.0Pa; the reaction gas is high-purity oxygen, and the partial pressure is controlled by a mass flow controller to be 0.2Pa; the carrier temperature during film deposition is 400 ° C; the sputtering time is 60 minutes. After sputtering, a photohydrophilic titanium dioxide film was obtained.

[0028] 3) Medium frequency magnetron sputtering technology to deposit Ag particles

[0029] The frequency of the intermediate frequency AC arc suppression power supply is 25Hz, the working voltage is 300V, and th...

Embodiment 2

[0036] Ag / TiO obtained under the above conditions 2 In the composite film, the titanium dioxide film is an anatase phase, and the silver particles are about 5nm. The hydrophilic experiment shows that Ag / TiO 2 The composite film showed a strong hydrophobic effect when it was not irradiated, and its contact angle was about 110 degrees. After ultraviolet radiation, the contact angle drops below 20 degrees within 30 minutes, and drops below 5 degrees after 2 hours. After stopping the irradiation for 72 hours, the contact angle returned to about 100.

Embodiment 3

[0038] Ag / TiO obtained under the above conditions 2 In the composite film, the titanium dioxide film is composed of anatase phase and amorphous phase, and the silver particles are about 8nm. The hydrophilic experiment shows that Ag / TiO 2 The composite film showed a strong hydrophobic effect when it was not irradiated, and its contact angle was about 100 degrees. After ultraviolet radiation, the contact angle drops below 10 degrees within 30 minutes, and drops below 3 degrees after 2 hours. After stopping the irradiation for 72 hours, the contact angle returned to about 80.

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Abstract

The present invention is contact angle adjustable composite Ag / TiO2 film and its preparation process, and relates to hydrophilic photo semiconductor film technology. The present invention features that the film is one kind of composite TiO2 film with Ag grains deposited onto the surface. During the preparation, TiO2 film is first prepared through magnetically controlled sputtering capable of effectively controlling the film crystal structure and raising the hydrophilicity of the film, and nano size Ag grains are then deposited onto the TiO2 film. The composite Ag / TiO2 film has freely adjustable hydrophilicity and hydrophobicity and contact angle capable of being adjusted in relatively large range. Normally, the film has relatively high hydrophobicity to prevent fogging, and under irradiation of ultraviolet ray it has reduced contact angle for easy cleaning.

Description

technical field [0001] Ag / TiO with adjustable contact angle 2 The composite thin film and its preparation method relate to the technical field of photogenerated hydrophilic properties of semiconductors. technical background [0002] Due to the many hazards of the fogging phenomenon, special materials with anti-fogging properties have attracted people's attention. The materials currently used in anti-fogging can be mainly divided into two categories: hydrophilic materials and hydrophobic materials. The application principle of hydrophilic materials is mainly because the contact angle of water on the surface of hydrophilic materials is generally less than 5 degrees, and water forms a uniform water film on the surface of materials, thereby preventing the occurrence of fogging. The anti-fogging principle of hydrophobic materials is: the contact angle of water on the surface of the material is too large, and it cannot be attached to the surface of the material at all, just like...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/34
Inventor 张弓庄大明侯亚奇赵明方玲
Owner TSINGHUA UNIV
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