Chemical machine polishing liquor for KTP crystal

Abstract

The invention discloses a chemical mechanic buffing liquid of titanium potassium oxide phosphate, which comprises the following parts: 10-90 percent nanometer SiO2 sol, 0.5-10 percent inorganic alkaline and organic alkaline, 0.5-10 percent non-ionic surfactant, 0.5-10 percent chelant and deionized water. The invention can prevent surface fish tail effectively, which improves the surface flatness.

Description

technical field [0001] The invention relates to the technical field of chemical mechanical polishing, more specifically, relates to a method for potassium titanyl phosphate (KTiOPO 4 , referred to as KTP) crystal chemical mechanical polishing fluid. Background technique [0002] Potassium titanyl phosphate (KTiOPO 4 , referred to as KTP) crystal is a kind of nonlinear optical crystal with excellent comprehensive performance. It has a high nonlinear coefficient (about 15 times that of KDP); high thermal conductivity (2 times that of BNN crystal); high resistance to light damage threshold; extremely high frequency conversion efficiency and relatively low price ;Stable chemical properties, such as: no deliquescence, no decomposition below 900°C; good mechanical properties; easy to polish the crystal surface, small mismatch, suitable for making frequency doublers, and its frequency doubling efficiency for 1064nm can reach about 80 %. The crystal can be used to make component...

AI Technical Summary

Problems solved by technology

[0004] The present invention aims to solve the technical problems of surface scratches, low flatness and unsatisfactory cleaning effect in the KTP crystal CMP polishing process, and discloses a chemically effective, easy-to-clean solution that effectively solves the problem of scratches and has a high polishing rate. , high activity polishing fluid with good fluidity