Chemical machine polishing liquor for KTP crystal
A technology of potassium titanyl phosphate and chemical machinery, applied in polishing compositions, chemical instruments and methods, etc., can solve the problems of low flatness, surface scratches, unsatisfactory cleaning effect, etc., and achieves high concentration, easy cleaning, The effect of high-speed, high-level, low-damage polishing
Inactive Publication Date: 2006-11-22
HEBEI UNIV OF TECH
View PDF0 Cites 6 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] The present invention aims to solve the technical problems of surface scratches, low flatness and unsatisfactory cleaning effect in the KTP crystal CMP polishing process, and discloses a chemically effective, easy-to-clean solution that effectively solves the problem of scratches and has a high polishing rate. , high activity polishing fluid with good fluidity
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreExamples
Experimental program
Comparison scheme
Effect test
Embodiment 1
[0023] Describe the preparation process of the present invention with embodiment 1:
[0024] Silica solution collagen solution (100wt%) is diluted with deionized water in a ratio of 1:4, and the above-mentioned concentration of 40% nano-SiO 2 Sol 90kg, add triethanolamine 0.5kg and KOH0.5kg while stirring, adjust the pH value of solution, then add 0.5kg of FA / O type I active agent and chelating agent FA / O2kg, add deionized water 6.5kg after stirring evenly to get The polishing liquid of the present invention.
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses a chemical mechanic buffing liquid of titanium potassium oxide phosphate, which comprises the following parts: 10-90 percent nanometer SiO2 sol, 0.5-10 percent inorganic alkaline and organic alkaline, 0.5-10 percent non-ionic surfactant, 0.5-10 percent chelant and deionized water. The invention can prevent surface fish tail effectively, which improves the surface flatness.
Description
technical field [0001] The invention relates to the technical field of chemical mechanical polishing, more specifically, relates to a method for potassium titanyl phosphate (KTiOPO 4 , referred to as KTP) crystal chemical mechanical polishing fluid. Background technique [0002] Potassium titanyl phosphate (KTiOPO 4 , referred to as KTP) crystal is a kind of nonlinear optical crystal with excellent comprehensive performance. It has a high nonlinear coefficient (about 15 times that of KDP); high thermal conductivity (2 times that of BNN crystal); high resistance to light damage threshold; extremely high frequency conversion efficiency and relatively low price ;Stable chemical properties, such as: no deliquescence, no decomposition below 900°C; good mechanical properties; easy to polish the crystal surface, small mismatch, suitable for making frequency doublers, and its frequency doubling efficiency for 1064nm can reach about 80 %. The crystal can be used to make component...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More IPC IPC(8): C09G1/14
Inventor 刘玉岭王胜利
Owner HEBEI UNIV OF TECH
PatSnap Eureka turns technology decisions into work you can execute. Powered by our Innovation Knowledge Graph, it runs expert workflows across engineering, life sciences, materials and intellectual property. Get your review-ready output in minutes.
