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Piezoelectric porcelain and method for production thereof

A technology of piezoelectric ceramics and a manufacturing method, which is applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve the problem. The problems of displacement, low piezoelectric performance, and lithium volatilization cannot be obtained, and the effects of good environment and ecology, excellent piezoelectric performance, and low risk are achieved.

Active Publication Date: 2007-01-17
TDK CORPARATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, these lead-free piezoelectric ceramics have problems in that they have lower piezoelectric performance and cannot obtain a large enough displacement compared to lead-based piezoelectric ceramics.
In addition, piezoelectric ceramics with sodium potassium lithium niobate as the main component also have problems. Sodium, potassium and lithium are easy to volatilize during firing, and it is difficult to fire.

Method used

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  • Piezoelectric porcelain and method for production thereof
  • Piezoelectric porcelain and method for production thereof
  • Piezoelectric porcelain and method for production thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1-1 and 1-2

[0070] Using a piezoelectric ceramic mainly composed of a composition of a first perovskite-type oxide, a second perovskite-type oxide, and a tungsten bronze-type oxide represented by Chemical Formula 5, according to figure 2The process shown produces the piezoelectric element shown in FIG. 1 . In this embodiment, referring to Figure 1 and figure 2 , using the symbols shown in Figure 1 for illustration.

[0071] chemical formula 5

[0072] (0.995-m)(Na 0.57 K 0.38 Li 0.05 )NbO 3 +mSrZrO 3 +0.005BaNb 2 o 6

[0073] First, prepare sodium carbonate (Na 2 CO 3 ) powder, potassium carbonate (K 2 CO 3 ) powder, lithium carbonate (Li 2 CO 3 ) powder, niobium oxide (Nb 2 o 5 ) powder, strontium carbonate (SrCO 3 ) powder, zirconia (ZrO 2 ) powder and barium carbonate (BaCO 3 )powder. In addition, manganese carbonate (MnCO 3 )powder. After fully drying the raw materials of these main components and subcomponents, weigh them so that the main components have the co...

Embodiment 1-3~1-5

[0085] A piezoelectric element was produced in the same manner as in Example 1-2 except that the composition represented by Chemical Formula 6 was included as the main component. At this time, in Examples 1-3 to 1-5, the third element (M1 in Chemical Formula 6) was changed as shown in Table 2. The raw materials of magnesium, calcium and barium use basic magnesium carbonate (4MgCO 3 ·Mg(OH) 2 4H 2 O) powder, calcium carbonate (CaCO 3 ) powder and barium carbonate powder. Moreover, content of a subcomponent is the same as Example 1-2.

[0086] chemical formula 6

[0087] 0.985 (Na 0.57 K 0.38 Li 0.05 )NbO 3 +0.01M1ZrO 3 +0.005BaNb 2 o 6

[0088] main ingredient

composition

M1

Subcomponent Mn

content of ※

(quality%)

relative dielectric

constant

εr

electromechanical coupling

Coefficient

Kr

(%)

produced

displacement

(%)

Example 1-2

Sr

0.31 ...

Embodiment 2-1~2-7

[0093] A piezoelectric element was produced in the same manner as in Examples 1-1 and 1-2, except that the composition represented by Chemical Formula 7 was contained as a main component. At this time, in Examples 2-1 to 2-7, the composition of the first element (values ​​of x and y in Chemical Formula 7) and zirconium as the second perovskite type oxide were changed as shown in Table 3. The content of strontium acid (m value in chemical formula 7). Moreover, content of a subcomponent is the same as that of Examples 1-1 and 1-2.

[0094] chemical formula 7

[0095] (0.995-m)(Na 1-x-y K x Li y )NbO 3 +mSrZrO 3 +0.005BaNb 2 o 6

[0096] Composition of principal components

Subcomponent Mn

content of ※

(quality%)

relative dielectric

constant

εr

electromechanical coupling

Coefficient kr

(%)

Generated bits

Shift (%)

x

(mol)

the y

(mol)

m

(mol)

Example ...

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PUM

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Curie pointaaaaaaaaaa
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Abstract

The invention provides a piezoelectric substrate which can be used for providing a piezoelectric porcelain which exhibits a wide range of service temperature, can exhibit a great displacement, can be produced through easy firing operation, and further is excellent from the view points of low pollution, the friendliness to the environment, and ecology, and a method for producing the piezoelectric substrate. A piezoelectric substrate (1) which comprises (1-m-n){Na1-x-yKxLiy}(Nb1-zTaz)O3} + m{(M1)ZrO3} + n{M2(Nb1-wTaw)2O6} as a primary component, wherein M1 and M2 are alkaline earth metal elements, and wherein x, y, m and n preferably satisfy 0.1 <= x <= 0.9, 0 <= y <= 0.1, 0 < m < 0.1, and 0 < n <= 0.01. The piezoelectric substrate can have a high Curie temperature and can generate a great displacement, and further the firing operation for the piezoelectric substrate can be carried out with ease. (M1)ZrO3 is first prepared and then is mixed with other materials.

Description

technical field [0001] The invention relates to a piezoelectric ceramic and a manufacturing method thereof. The piezoelectric ceramic includes a composition containing a perovskite oxide and a tungsten bronze oxide, and is suitable for vibration elements, sounding bodies or sensors etc. Background technique [0002] Actuators made of piezoelectric ceramics utilize the so-called piezoelectric phenomenon that produces mechanical strain and stress when an electric field is applied. The characteristic of this kind of actuator is that it can obtain a small amount of displacement with high precision, and at the same time generate relatively large stress, etc., for example, it can be used for the positioning of precision working machinery and optical devices. Lead zirconate titanate (PZT), which has excellent piezoelectric properties, has been used the most as piezoelectric ceramics for actuators. However, lead zirconate titanate contains a lot of lead, and the dissolution of lea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/495H01L41/187H01L41/24C04B35/00H01L41/09H01L41/22H01L41/257H01L41/39
CPCC04B35/495C04B2235/3201C04B2235/3293C04B2235/3232C04B2235/3215C04B2235/3217C04B2235/3277C04B2235/3213C04B2235/3279C04B2235/3249C04B2235/3203C04B2235/3262C04B2235/3272C04B2235/3224C04B2235/3287C04B2235/3418C04B2235/3284C04B35/63C04B2235/3205H01L41/43C04B2235/3286C04B2235/3251H01L41/1873C04B2235/3255C04B2235/3244H10N30/8542H10N30/097C04B35/48H10N30/20
Inventor 古川正仁七尾胜室泽尚吾佐藤直义黑田朋史
Owner TDK CORPARATION
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