Charge restraining method and apparatus for piezoelectric oxide single crystal

A single crystal, oxide technology, applied in chemical instruments and methods, vanadium oxide, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve problems such as electrode damage, electrode short circuit, etc., to improve reliability and suppress modulation. , Improve the effect of vacuum

Inactive Publication Date: 2007-04-18
YAMAJIYU CERAMICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, there is a risk that the electrodes formed on the piezoelectric substrate may be short-circuited by static electricity
In addition, fine metal powder, dust, dirt, etc. generated during the processing steps are electrostatically attracted to the surface of the piezoelectric substrate to short-circuit the electrodes, and there is a risk of damaging the electrodes in an exposed state

Method used

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  • Charge restraining method and apparatus for piezoelectric oxide single crystal
  • Charge restraining method and apparatus for piezoelectric oxide single crystal
  • Charge restraining method and apparatus for piezoelectric oxide single crystal

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no. 1 approach

[0052] First, the configuration of the charge suppressing device in this embodiment is described. In FIG. 1 , an overview of a charge suppression device is illustrated. Also, the model shown in Figure 2 shows how the wafers are placed in the processing vessel. As shown in FIG. 1 , a charge suppression apparatus 1 includes a processing container 2 , a heater 3 , and a vacuum pump 4 .

[0053] The processing container 2 is made of quartz glass. One of the opposite ends of the processing vessel 2 is connected to a pipeline. Through this connecting line, the processing container 2 is evacuated. In the processing container 2, a wafer 50 and lithium chloride powder 60 are housed.

[0054] The wafer 50 is supported by a quartz wafer cassette 51 . The wafer 50 is composed of a 42° Y-X cut lithium tantalate single crystal. Wafer 50 has a diameter of 4 inches (approximately 10.16 cm) and a thickness of 0.5 mm. The number of wafers 50 was placed in the number of 50 pieces at a pit...

no. 2 approach

[0063] The second embodiment differs from the first embodiment in that the type and placement form of the reducing agent are changed. Since other configurations are the same as those of the first embodiment, differences will be described here.

[0064] In Fig. 3, how to place the wafer and the reducing agent in this embodiment is illustrated in a model. In FIG. 3, components corresponding to those in FIG. 2 are denoted by the same reference numerals. As shown in FIG. 3 , two opposite surfaces of the wafer 50 are coated with a lithium carbonate solution 62 , and the solution 62 is to dissolve 100 g of lithium carbonate powder into polyvinyl alcohol. Lithium carbonate solution 62 is the reducing agent in the present invention. Coating of the wafer 50 was carried out by immersing the wafer 50 in a lithium carbonate solution 62, applying the lithium carbonate solution 62 to the surface of the wafer 50, and then drying them in a greenhouse at 200°C. In the processing container 2...

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Abstract

To provide a processing method which can restrain the charging of lithium tantalate single crystal or lithium niobate single crystal without impairing the piezoelectricity. Moreover, to provide a processing apparatus which can carry out the processing method simply and easily. It is characterized in that a wafer 50, made from a lithium tantalate single crystal or a lithium niobate single crystal, and a reducing agent 60, including an alkali metal compound, are accommodated in a processing tank 2, and the inside of the processing tank 2 is held at a temperature of from 200 °C to 1000 °C under decompression, thereby reducing the wafer 50.

Description

technical field [0001] The present invention relates to a charge suppression method of a piezoelectric oxide single crystal used for a piezoelectric substrate of an elastic surface acoustic wave filter, etc., and to a charge suppression device used for the purpose. Background technique [0002] Lithium tantalate (LiTaO 3 ) single crystal and lithium niobate (LiNbO 3 ) single crystals are well known as piezoelectric oxide single crystals, and have been used for piezoelectric substrates of surface acoustic wave filters (SAW filters) and the like. In addition, the two single crystals are also used in the form of nonlinear optical crystals in applied optical products, such as optical modulators and wavelength conversion devices, which are basic components of large-capacity high-speed communication networks. Both single crystals have the characteristics of large pyroelectric coefficient and high impedance. Therefore, slight temperature changes can generate charges on its surfa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B29/30C30B33/02C01G31/02C30B33/00
CPCH01L41/1873C30B29/30C30B33/00H01L41/253H10N30/8542H10N30/04C30B33/02
Inventor 堀田和利菅野和也宫川大作仓知雅人笹俣武治佐桥家隆
Owner YAMAJIYU CERAMICS
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