SPM cantilever and fabricating method thereof
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[0038] A first embodiment of the invention will now be described. An overall construction of the lever portion and probe portion of the first embodiment of SPM cantilever according to the invention is shown in FIG. 2, and the configurations as seen from the directions of A to C in FIG. 2 of the probe portion are shown in FIGS. 3A, 3B and 3C, respectively. As shown in these figures, a probe portion 2 is formed toward the free end of a lever portion 1. Here the probe portion 2 is constituted by a plate-like thin film formed toward the free end of the lever portion 1, and an acutely angled terminal end portion 3 of the probe portion 2 is located at the free end of the lever.
[0039] The probe portion 2 is inclined by an angle of 54.7 degrees corresponding to the lattice plane (111) of silicon with respect to the lever portion 1 at its boundary 4 to the lever portion 1. Further, two sides 2a, 2b of the probe portion 2 that contain the terminal end portion 3 are bent toward the inner side...
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[0067] A second embodiment of the invention will now be described. While the description in the first embodiment has been made with respect to the plate-like probe portion, this embodiment will be described with respect to the probe portion in a pyramidal or conic form, specifically of a triangular pyramid. The structure of the probe portion of cantilever for use in scanning probe microscopy (SPM) according to this embodiment is shown in FIG. 7. Referring to FIG. 7, a probe portion 32 is formed toward the free end of a lever portion 31 extended from a support portion (not shown). Here the probe portion 32 has a triangular pyramidal structure, and a tip 33 of the probe portion is slenderly sharpened by sharpening treatment and points the direction of the free end of the lever portion 31. It should be noted that the radius of curvature of the probe portion tip is extremely sharpened to be 20 nm or less and the probe portion has a high aspect ratio.
[0068] By thus forming the probe por...
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