Variable reluctance fast positioning system and methods

a positioning system and resistance technology, applied in the direction of magnets, manufacturing tools, magnets, etc., can solve the problems of hysteresis loss, imposing limits on the type, quality and rate at which the intended surface can be produced, and piezoelectrically actuated fts's also have significant disadvantages
US20050223858A1Inactive Publication Date: 2005-10-13MASSACHUSETTS INST OF TECH
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
MASSACHUSETTS INST OF TECH
Publication Date
2005-10-13
Estimated Expiration
Not applicable · inactive patent

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Abstract

The preferred embodiments of the present invention are directed to high bandwidth positioning systems such as fast tool servos (FTS). The applications of this invention include, for example, diamond turning of mold with structured surface for mass production of films for brightness enhancement and controlled reflectivity, diamond turning of molds for contact lens and micro-optical positioning devices. Preferred embodiments of the fast tool servo can have a closed-loop bandwidth of approximately 20±5 kHz, with acceleration of up to approximately 1000 G or more. The resolution or position error is approximately 1 nm root mean square (RMS). In a preferred embodiment, the full stroke of 50 μm can be achieved up tol kHz operation.
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Description

CROSS REFERENCE TO RELATED APPLICATIONS

[0001] This patent application claims the benefit of U.S. Provisional Patent Application 60 / 517,216, having a filing date of Oct. 31, 2003 and U.S. Provisional Patent Application 60 / 619,183, having a filing date of Oct. 15, 2004, these applications being incorporated herein by reference in their entirety.BACKGROUND OF THE INVENTION

[0002] Fast Tool Servo (FTS) technology can enable precise positioning or manufacturing of complicated sculptured surfaces having nanometer-scale resolution requirements. Such surfaces are used in a wide range of products, including films for brightness enhancement and controlled reflectivity, sine wave ring mirrors used in carbon dioxide (CO2) laser resonators, molds for contact lenses, as well as in micro-optical devices such as Fresnel lenses, multi-focal lenses and microlens arrays. The limits on stroke, bandwidth, acceleration, and position noise of the FTS impose limits on the types, quality, and rate at which...

Claims

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