Tungsten based sintered compact and method for production thereof

US20070172378A1Inactive Publication Date: 2007-07-26NIPPON TUNGSTEN CORP
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Patent Information

Authority / Receiving Office
US · United States
Current Assignee / Owner
NIPPON TUNGSTEN CORP
Publication Date
2007-07-26
Estimated Expiration
Not applicable · inactive patent

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Abstract

The present invention is directed to provide a tungsten-based sintered body having a relative density of 99.5% or more (a porosity of 0.5 volume % or less) and a uniform and isotropic structure, which has not been able to be achieved by conventional techniques. In particular, the tungsten-based sintered body is intended for use as a discharge lamp electrode, a sputtering target, a crucible, a radiation shielding member or a resistance welding electrode. The intended tungsten-based sintered body is produced by subjecting a tungsten-based powder to a CIP process at a pressure of 350 MPa or more to form a powder compact, sintering the powder compact in a hydrogen gas atmosphere at a sintering temperature of 1600° C. or more for a holding time of 5 hours or more to form a sintered compact, and subjecting the sintered compact to a HIP process in an argon gas atmosphere under conditions of 150 MPa or more and 1900° C. or more. The tungsten-based sintered body of the present invention is suitably used, for example, as a discharge lamp electrode, a sputtering target, a crucible, a radiation shielding member, an electric discharge machining electrode, a semiconductor element mounting substrate and a structural member.
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Description

TECHNICAL FIELD

[0001] The present invention relates to a tungsten-based sintered body and a production method therefor.

[0002] The present invention also relates to a product of the tungsten-based sintered body, such as a discharge lamp electrode, a sputtering target, a crucible, a radiation shielding member, a resistance welding electrode, a semiconductor element mounting substrate, a structural member, a switch contact, a member for semiconductor manufacturing equipment, a member for an ion-implantation apparatus or an internal member for a nuclear fusion reactor. BACKGROUND ART

[0003] Typically, a tungsten-based sintered body has been produced by use of a “electric current-aided sintering process” which is designed to apply a high-voltage pulsed current to a rod-shaped tungsten-based powder compact through a pair of electrodes attached, respectively, to opposite ends of the powder compact, so as to sinter the powder compact.

[0004] The electric current-aided sintering process ha...

Claims

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