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Organic electro luminescence device and its manufacturing method

An electroluminescent device, organic technology, applied in the direction of electroluminescent light source, electro-solid device, semiconductor/solid-state device manufacturing, etc., can solve the problem of not being able to ensure the uniformity of organic functional layer evaporation at the same time, adverse device overall performance and yield It can not significantly improve the contrast of the device and other problems, so as to achieve the effect of saving equipment investment costs, saving production management costs, and improving life expectancy.

Active Publication Date: 2008-02-27
BEIJING VISIONOX TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] ① The baking temperature of the photoresist (such as 120°C) will damage the organic film;
[0005] ② Solvents, developers, and corrosive solutions of photoresist will damage the organic film;
[0009] (1) The spacer column 4 is made of a layer of insulating material. The cross section of the line 4 has an inverted trapezoidal shape with a large top and a small bottom. After the organic functional layer 5 and the metal layer 6 are deposited, part of the metal layer 6 may go over The organic layer 5 falls on the transparent conductive film 2 (as shown in FIG. 2 ) between the bottom of the single-layer spacer column 4 and the organic layer 5, causing the pixel to be short-circuited and not to emit light;
[0010] (2) The single-layer spacer column 4 can only be distributed parallel to the direction perpendicular to the transparent electrode 2, which reduces the reverse suppression voltage between the metal lines while separating the metal electrodes 6, but cannot reduce the voltage between the first transparent electrodes 2. The reverse suppression voltage between them makes the power consumption of the device higher;
[0011] (3) Doping black dye in the spacer material can improve the contrast when the device emits light, because the single-layer spacer 4 is only distributed parallel to the direction perpendicular to the transparent electrode 2, but not in the direction parallel to the transparent electrode 2 Parallel distribution, so the contrast of the device cannot be significantly improved
[0013] ① Form the pattern of the insulating base 3 first, and then form the pattern of the upper layer of cathode partition wall 4 in the same way. The process is complicated and there are many processes, and the surface of the first electrode in the light-emitting area of ​​the device is polluted by two layers of photoresist successively. It is not conducive to the improvement of the overall performance and yield of the device;
[0014] ②The cross-section of the cathode partition wall 4 is an inverted trapezoidal shape with a large top and a small bottom. Due to the limitation of the inclination angle of the inverted trapezoid, only by vertically evaporating the organic functional layer and obliquely evaporating the metal layer can the metal layer completely cover the organic functional layer. edge, but the evaporation angle of the organic functional layer is about 70° to make the organic thin film have better uniformity, and the shape of the cross section of the cathode partition wall 4 cannot ensure the uniformity of the evaporation of the organic functional layer and the complete coverage of the metal layer at the same time. The purpose of covering the edge of the organic functional layer, it can be said that the isolation effect of this kind of cathode partition wall 4 is poor, and it is not optimized enough.

Method used

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  • Organic electro luminescence device and its manufacturing method
  • Organic electro luminescence device and its manufacturing method
  • Organic electro luminescence device and its manufacturing method

Examples

Experimental program
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Effect test

Embodiment 1

[0069] (The entire preparation process of OLED is carried out in the purification workshop.) ITO glass with a square resistance of 10Ω is cleaned with UV irradiation and lotion containing surfactant in sequence, and then dried. The film thickness of ITO is 180nm. A group of parallel and separated straight lines are engraved with a line width of 100 μm and a line gap of 15 μm. After cleaning and drying again, the first layer of negative cyclized rubber, an organic insulating material, was spin-coated on the ITO pattern with a film thickness of 1.1 μm, and baked on a hot plate at 100°C for 90s. The first layer is exposed but not developed, and the exposure pattern is a network structure, that is, only the light-emitting area and the lead connection area of ​​the pixel point of the device are exposed. The line width parallel to the ITO line is 30 μm, and the line perpendicular to the ITO line The width is 30 μm. Then continue to spin-coat the second layer of insulating material ...

Embodiment 2

[0071] (The entire preparation process of OLED is carried out in the purification workshop.) ITO glass with a sheet resistance of 15Ω is cleaned and dried with UV irradiation and lotion containing surfactant in sequence. The film thickness of ITO is 170nm. A group of parallel and separated straight lines were produced, with a line width of 400 μm and a line gap of 30 μm. After cleaning and drying again, the first layer of organic insulating material photosensitive PI DL-1000 was spin-coated on the ITO pattern with a film thickness of 1.5 μm, and baked in a convection oven at 125°C for 25 minutes. The first layer is exposed but not developed, and the exposure pattern is a network structure, that is, only the light-emitting area and the lead connection area of ​​the pixel point of the device are exposed. The line width parallel to the ITO line is 45 μm, and the line perpendicular to the ITO line The width is 40 μm. Then continue to spin-coat the second layer of insulating mater...

Embodiment 3

[0073] (The entire preparation process of OLED is carried out in the purification workshop.) ITO glass with square resistance -4 Evaporate organic functional layers and metal layers in a vacuum furnace above Pa. The organic functional layer is sequentially composed of CuPc, NPB and Alq 3 Composition, the film thickness is 20nm, 70nm and 50nm respectively. The metal layer is sequentially composed of Mg:Ag alloy (evaporation rate ratio 10:1, alloy mass ratio 4:1) and Ag, and the film thicknesses are 100nm and 300nm respectively. Encapsulate the device in an inert atmosphere. The lighting voltage of the device is 2.7V, the light is uniform, and the current density is 20mA / cm 2 The luminous efficiency is 4.51m / W, and the device life is more than 5000

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Abstract

In the invention, isolation column in double layer is prepared on graphics of first electrode. Cross section of lines on the second layer in the isolation column possesses shape of big in top and small in bottom, and its bevel edge possesses two adductive angle alpha, beta, and alpha>beta. Then, organic functional layer and second electrode are deposited in sequence. Angle beta on bevel edge increases tolerance for angle and width of coating by vaporization of metal back electrode. Different angles of coating by vaporization realize full covering organic functional layer, which is easier eroded by water and oxygen then electrode, by the back electrode so as to prevent organic functional layer from exposing out of the back electrode. The isolation column is prepared through twice coating organic thin films, twice exposures and one time of hot setting. The invention raises service time and even luminescence of parts.

Description

technical field [0001] The invention relates to an organic electroluminescence device and a preparation method of the device, belonging to the technical field of electronic semiconductor components. Background technique [0002] Organic Electroluminescent Devices (Organic Electroluminescent Devices, hereinafter referred to as OLEDs) are generally composed of a transparent first electrode located on a transparent substrate, an organic electroluminescent medium (organic functional layer) deposited on the first electrode, and an organic electroluminescent medium (organic functional layer) located on the transparent substrate. The second electrode (metal electrode) above the organic electroluminescence medium. The transparent electrode serves as the anode of the device, and the metal electrode serves as the cathode of the device. Apply a high level to the transparent electrode and a low level to the metal electrode to make the device emit light. A group of anodes (or cathodes)...

Claims

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Application Information

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IPC IPC(8): H01L51/52H01L51/56H05B33/10H05B33/14H05B33/22
Inventor 邵玉暄邱勇
Owner BEIJING VISIONOX TECH
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