Organic electro luminescence device and its manufacturing method

An electroluminescent device, organic technology, applied in the direction of electroluminescent light source, electro-solid device, semiconductor/solid-state device manufacturing, etc., can solve the problem of not being able to ensure the uniformity of organic functional layer evaporation at the same time, adverse device overall performance and yield It can not significantly improve the contrast of the device and other problems, so as to achieve the effect of saving equipment investment costs, saving production management costs, and improving life expectancy.

Active Publication Date: 2008-02-27
BEIJING VISIONOX TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] ① The baking temperature of the photoresist (such as 120°C) will damage the organic film;
[0005] ② Solvents, developers, and corrosive solutions of photoresist will damage the organic film;
[0009] (1) The spacer column 4 is made of a layer of insulating material. The cross section of the line 4 has an inverted trapezoidal shape with a large top and a small bottom. After the organic functional layer 5 and the metal layer 6 are deposited, part of the metal layer 6 may go over The organic layer 5 falls on the transparent conductive film 2 (as shown in FIG. 2 ) between the bottom of the single-layer spacer column 4 and the organic layer 5, causing the pixel to be short-circuited and not to emit light;
[0010] (2) The single-layer spacer column 4 can only be distributed parallel to the direction perpendicular to the transparent electrode 2, which reduces the reverse suppression voltage between the metal lines while separating the metal electrodes 6, but cannot reduce the voltage between the first transparent electrodes 2. The reverse suppression voltage between them makes the power consumption of the device higher;
[0011] (3) Doping black dye in the spacer material can improve the contrast when the device emits light, because the single-layer spacer 4 is only distributed parallel to the direction perpendicular to the transparent electrode 2, but not in the direction parallel to the transparent electrod

Method used

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  • Organic electro luminescence device and its manufacturing method
  • Organic electro luminescence device and its manufacturing method
  • Organic electro luminescence device and its manufacturing method

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0068] Example 1.

[0069] (The whole preparation process of OLED is implemented in the purification workshop) The ITO glass with a sheet resistance of 10Ω is washed successively with UV irradiation and a lotion containing surfactants, and then dried. The film thickness of ITO is 180nm. Carve a set of parallel and divided straight lines with a line width of 100μm and a line gap of 15μm. It was cleaned and dried again, and the first layer of organic insulating material negative cyclized rubber was spin-coated on the ITO pattern, with a film thickness of 1.1 μm, and baked in a hot plate at 100°C for 90 seconds. The first layer is exposed but not developed. The exposed pattern is a mesh structure, that is, only the light-emitting area and lead connection area of ​​the device pixels are exposed. The line width parallel to the ITO line is 30μm, and the line perpendicular to the ITO line The width is 30μm. Then, the second layer of negative photoresist ZPN1168, which is an insulating ma...

Example Embodiment

[0070] Example 2.

[0071] (The entire preparation process of OLED is implemented in the purification workshop) The ITO glass with a sheet resistance of 15Ω is cleaned and dried with UV irradiation and a lotion containing surfactants. The film thickness of ITO is 170nm. A set of parallel and divided straight lines are formed, the line width is 400 μm, and the line gap is 30 μm. Clean and dry again, spin-coating the first layer of organic insulating material photosensitive PI DL-1000 on the ITO pattern, with a film thickness of 1.5 μm, and bake it in a convection oven at 125°C for 25 minutes. The first layer is exposed but not developed. The exposed pattern is a mesh structure, that is, only the light-emitting area and lead connection area of ​​the device pixels are exposed. The line width parallel to the ITO line is 45μm, and the line perpendicular to the ITO line The width is 40 μm. Then, the second layer of negative photoresist ZPN1168, which is a second layer of insulating mate...

Example Embodiment

[0072] Example 3.

[0073] (The entire preparation process of OLED is implemented in the purification workshop.) Wash the ITO glass with a sheet resistance of -4 The organic functional layer and the metal layer are vapor-deposited in a vacuum furnace above Pa. The organic functional layer consists of CuPc, NPB and Alq 3 The composition and the film thickness are 20nm, 70nm and 50nm respectively. The metal layer is composed of Mg:Ag alloy (evaporation rate ratio 10:1, alloy mass ratio 4:1) and Ag in sequence, and the film thickness is 100 nm and 300 nm, respectively. The device is packaged in an inert atmosphere. The lighting voltage of the device is 2.7V, the light is uniform, and the current density is 20mA / cm 2 When the luminous efficiency is 4.51m / W, the device life>5000

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Abstract

In the invention, isolation column in double layer is prepared on graphics of first electrode. Cross section of lines on the second layer in the isolation column possesses shape of big in top and small in bottom, and its bevel edge possesses two adductive angle alpha, beta, and alpha>beta. Then, organic functional layer and second electrode are deposited in sequence. Angle beta on bevel edge increases tolerance for angle and width of coating by vaporization of metal back electrode. Different angles of coating by vaporization realize full covering organic functional layer, which is easier eroded by water and oxygen then electrode, by the back electrode so as to prevent organic functional layer from exposing out of the back electrode. The isolation column is prepared through twice coating organic thin films, twice exposures and one time of hot setting. The invention raises service time and even luminescence of parts.

Description

technical field [0001] The invention relates to an organic electroluminescence device and a preparation method of the device, belonging to the technical field of electronic semiconductor components. Background technique [0002] Organic Electroluminescent Devices (Organic Electroluminescent Devices, hereinafter referred to as OLEDs) are generally composed of a transparent first electrode located on a transparent substrate, an organic electroluminescent medium (organic functional layer) deposited on the first electrode, and an organic electroluminescent medium (organic functional layer) located on the transparent substrate. The second electrode (metal electrode) above the organic electroluminescence medium. The transparent electrode serves as the anode of the device, and the metal electrode serves as the cathode of the device. Apply a high level to the transparent electrode and a low level to the metal electrode to make the device emit light. A group of anodes (or cathodes)...

Claims

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Application Information

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IPC IPC(8): H01L51/52H01L51/56H05B33/10H05B33/14H05B33/22
Inventor 邵玉暄邱勇
Owner BEIJING VISIONOX TECH
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