Nitride semiconductor device
A technology of nitride semiconductors and nitrides, which is applied in the direction of semiconductor devices, electrical components, transistors, etc., can solve the problems of increased cost of light-emitting diodes, and achieve the effects of reduced driving voltage, low power loss and heat generation, and reduced driving voltage
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Embodiment 1
[0050] figure 1 The light-emitting diode shown as the semiconductor element of Embodiment 1 of the present invention has a p-type silicon substrate 1, a buffer zone 3 as an n-type nitride semiconductor region, and a main semiconductor region for constituting the main part of the light-emitting diode, that is, the active part. 4. The first and second electrodes 5 and 6. The main semiconductor region 4 is composed of an n-type nitride semiconductor layer 13 , an active layer 14 and a p-type nitride semiconductor layer 15 epitaxially grown on the buffer zone 3 in this order.
[0051] The p-type silicon substrate 1 is a characteristic structural requirement of the present invention, and has the opposite conductivity type no matter whether the n-type buffer zone 3 is arranged on the layer or not. Doping in the silicon substrate 1, for example, at a concentration of 5×10 18 cm -3 ~5×10 19 cm -3 The left and right p-type impurities are Group 3 elements such as B (boron), which f...
Embodiment 2
[0081] Next, explain Figure 4 The light-emitting diode of Example 2 is shown. But when Figure 4 and later Figure 5 to Figure 9 , in essence with figure 1 The same symbols are assigned to the same parts, and their explanations are omitted.
[0082] Figure 4 The light-emitting diodes are set at figure 1 The deformed buffer zone 3a of the buffer zone 20 of the multi-layer structure is attached on the buffer zone 3 of the figure 1 is the same structure. Figure 4 The deformation buffer 3a, is passed in with figure 1 On the n-type buffer zone 3 made of n-type aluminum gallium indium nitride (AlInGaN) formed in the same way, a buffer zone 20 with a multi-layer structure is arranged. Figure 4 The buffer zone 20 of the multilayer structure is constituted by repeating a plurality of first layers 21 and a plurality of second layers 22 arranged alternately. The plurality of first layers 21 are formed of a nitride semiconductor containing Al (aluminum) in a first proportion....
Embodiment 3
[0091] Figure 5 The LED shown in Example 3, in figure 1Between the p-type silicon substrate 1 and the n-type buffer area 3, an interposer 11 made of a nitride semiconductor containing aluminum is arranged, and the n-type buffer area 3 is also used as an n-type cladding layer, and other figure 1 It is the same structure. exist Figure 5 In , the combination of interposer 11 and n-type buffer zone 3 is denoted as deformation buffer zone 3b, and the combination of active layer 14 and p-type nitride semiconductor region 15a made of InGaN is denoted as main semiconductor region 4a.
[0092] Interposer 11 is preferably composed of a nitride semiconductor represented by the following chemical formula.
[0093] al x In y Ga 1-x-y N
[0094] Wherein, x and y are values satisfying 0<x≤1, 0≤y<1, and 0<x+y≤1. In this Example 3, no n-type impurities are contained in interposer 11 . However, n-type impurities can also be contained in interposer 11 .
[0095] Interposer 11 is a ...
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