FeLiWO4 anode film material and its making method

A thin-film material, iron tungstate technology, applied in electrode manufacturing, metal material coating process, battery electrodes, etc., can solve the problems of expensive cobalt, short-circuit of thin-film batteries, harsh preparation conditions, etc.

Inactive Publication Date: 2007-09-12
FUDAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, cobalt element is toxic and cobalt is expensive, which limits the LiCoO 2 and LiNi x co 1-x o 2 Application in battery
LiMn 2 o 4 It is prone to phase change in the 3V region, resulting in capacity attenuation
These thin film materials must be deposited under heating

Method used

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  • FeLiWO4 anode film material and its making method
  • FeLiWO4 anode film material and its making method
  • FeLiWO4 anode film material and its making method

Examples

Experimental program
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Embodiment 1

[0015] In the present invention, the radio frequency magnetron sputtering deposition method is adopted to prepare lithium iron tungstate (LiFe(WO 4 ) 2 ) positive film. It was carried out in a vacuum system for magnetron sputtering deposition. First, use a molecular pump to pump the air pressure of the vacuum chamber to 1.0×10 -3 Pa, then the volumetric flow of argon and oxygen into the vacuum chamber is controlled by the needle valve, the flow ratio of argon and oxygen is 2:1 to 4:1, the direction of the inlet is facing the deposition substrate, and the mixed gas flow is adjusted Keep the air pressure in the vacuum chamber at 1.2 Pa. During deposition, the RF output power is 40 watts, the distance between the substrate and the lithium iron tungstate target is 5 cm, the deposition rate is 35 nm per hour, and the substrate temperature is room temperature. With the Pt sheet as the substrate, the lithium iron tungstate target is synthesized by high-temperature solid-state reac...

Embodiment 2

[0019] Lithium iron tungstate (LiFe(WO) was prepared by radio frequency magnetron sputtering deposition method. 4 ) 2 ) positive film. First, use a molecular pump to pump the air pressure of the vacuum chamber to 1.0×10 -3 Pa, then the flow ratio of the argon gas and oxygen gas that is passed into the vacuum chamber is controlled by two needle valves to be 3:1, the direction of the inlet is facing the deposition substrate, and the flow rate of the mixed gas is adjusted to keep the pressure of the vacuum chamber at 1.2Pa. , the RF output power was 40 watts, the distance between the substrate and the lithium iron tungstate target was 5 cm, the deposition rate was 35 nm per hour, and the substrate temperature was room temperature. With the Pt sheet as the substrate, the lithium iron tungstate target is synthesized by high-temperature solid-state reaction.

[0020] Li / LiPON / LiFe(WO 4 ) 2 The specific capacity of / Pt is about 104mAh / cm 2 -μm (accompanying drawing 2), the numb...

Embodiment 3

[0022] Lithium iron tungstate (LiFe(WO) was prepared by radio frequency magnetron sputtering deposition method. 4 ) 2 ) positive film. First, use a molecular pump to pump the air pressure of the vacuum chamber to 1.0×10 -3 Pa, then the flow ratio of the argon gas and oxygen gas that is passed into the vacuum chamber is controlled by two needle valves to be 2:1, the direction of the inlet is facing the deposition substrate, and the flow rate of the mixed gas is adjusted to keep the pressure of the vacuum chamber at 1.0Pa. , the RF output power was 40 watts, the distance between the substrate and the lithium iron tungstate target was 5 cm, the deposition rate was 40 nm per hour, and the substrate temperature was room temperature. With the Pt sheet as the substrate, the lithium iron tungstate target is synthesized by high-temperature solid-state reaction.

[0023] Li / LiPON / LiFe(WO 4 ) 2 The specific capacity of / Pt is about 101mAh / cm 2 -μm, the number of cycles can reach 15...

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Abstract

The invention belongs to the lithium ion film battery technology area, specifically relates to a positive electrode material tungstate ferric lithium film (LiFe (WO4) 2) which applies to the entire solid film lithium battery and its preparation method, the invention uses the radio frequency magnetron sputtering sedimentation method prepare amorphous material tungstenic acid ferric lithium film. Combined the lithium phosphorus oxygen nitrogen (LiPON) solidstate electrolyte film by radio frequency magnetron sputtering preparation and the metal lithium negative film by the vacuum hotly evaporate preparation, composing the solid state film lithium battery. The battery specific capacity can reach 104 mAh/cm2-u m; the cycle-index can reach 150 times. These results indicated that, the radio frequency magnetron sputtering method prepare LiFe (WO4) 2 positive electrodes films, can apply to the entire solid state film lithium battery.

Description

technical field [0001] The invention belongs to the technical field of lithium-ion thin-film batteries, and in particular relates to a lithium iron tungstate thin-film used as an anode material of an all-solid-state thin-film lithium battery and a preparation method thereof. The present invention relates to firstly adopting the method for radio frequency magnetron sputtering to prepare lithium iron tungstate film (LiFe(WO 4 ) 2 ). This technology has successfully prepared a thin film with amorphous properties. Its main feature is that it can form a good interface with the solid electrolyte film, has high electronic conductivity, and can be applied to all-solid-state thin-film lithium batteries. Background technique [0002] With the miniaturization of microelectronic devices, it is urgent to develop a matching miniaturized and long-life power supply. Compared with other chemical batteries, the all-solid-state rechargeable lithium-ion thin film battery has the largest spec...

Claims

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Application Information

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IPC IPC(8): H01M4/02H01M4/04C23C14/35C23C14/54C23C14/06C01G1/00H01M4/485
CPCY02E60/10
Inventor 李驰麟傅正文
Owner FUDAN UNIV
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