High-purity implanting planar array microelectrode and its production

A planar array and manufacturing method technology, applied in the direction of electrodes, artificial respiration, physical therapy, etc., can solve the problems of increasing the density of micro-electrode arrays, complex manufacturing process, and difficult realization, so as to improve the stimulation or recording effect, simple manufacturing process, Ease of mass production
CN101073687AInactive Publication Date: 2007-11-21SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
Publication Date
2007-11-21
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention is concerned with a kind of high density and implantation plane array microelectrode and its produce method. The said array microelectrode uses polymer as insulated layer material and the leads connects with the electrode activating location or record location of different insulated layers. Produce through hole on the isolation insulated layer and form metal connecting structure in the through hole by plating process to connect the leads with upper and down electrode activating location or record location on the isolation insulated layer. Polishing the upper surface with chemistry polishing after the plating process in order that can keep the well connecting between plating metal pole and upper layer spattering metal layer. This produce method can produce higher density array micro electrode on unit area than the one of common lead setting on single layer to realize the activation or record with higher selectivity to implantation array micro electrode.
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Description

technical field

[0001] The invention relates to a method for manufacturing a high-density implanted planar array microelectrode, which can be applied to the fields of neurological disease treatment, neurobiological basic research and the like, and belongs to the field of implanted microelectrodes. Background technique

[0002] Neural engineering system is currently a very active and rapidly developing research field, such as brain-computer interface, neural prosthesis and other issues have received more and more attention. In a neuroengineered system, the most fundamental and critical part is the neuro-electronic interface, the electrodes. According to different objects of action and application goals, people have successively researched and developed various forms of implantable microelectrodes, including hoop-shaped microelectrodes, needle-shaped array microelectrodes, planar array microelectrodes, and sieve-shaped microelectrodes. Among them, the planar array microelectr...

Claims

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