Laser micro processor optical focus system

Abstract

The present invention relates to machine building technology and laser micro machining technology, and is especially one kind of laser focusing system for laser micro processing machine. The laser focusing system has small focused laser spot with the size unchanged with the distance and high workpiece location insensitivity. The laser focusing system includes one regular rotating prism, one first spherical lens in the distance to the regular rotating prism determined based on the power of the laser, and one second spherical lens confocal with the first one. Adopting different spherical lenses as the second spherical lens can obtain no-diffraction laser beam of different spot sizes for different processing purposes.

Description

technical field [0001] The invention relates to the fields of mechanical manufacturing and laser micromachining, in particular to an optical focusing system of a laser micromachining machine, which is particularly suitable for the requirement that the focusing spot is small, the size of the focusing spot does not change with the distance, and the sensitivity to the workpiece position error is Zero, and no need to consider the parfocal problem in the processing. Background technique [0002] Laser processing is one of the main directions of laser applications. Due to the small heat-affected zone of laser processing, good beam directionality, and the ability to focus the light spot to the wavelength level, the processing range and depth can be accurately controlled, with high repeatability and reliability. Good edge, selective processing, precision processing, so it is the most competitive alternative in machining. Laser processing is an application of comprehensive technolog...

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Problems solved by technology

Herman et al. proposed to use a rotating prism to generate a non-diffraction beam, which has a simple structure, high energy utilization rate, and high energy conversion efficiency. The parameters of the non-diffraction beam generated by the rotating prism are determined, and the size of the focused spot is also determined, so the processing adaptability is poor. At the same time, due to the existence of errors, the spot of the non-diffraction beam actually produced by this system is determined in advance. Therefore, in order to obtain the spot required to meet the processing requirements, it is impossible to design and process a rotating prism that meets the requirements at one time, and the rotating prism needs to be replaced. Aspherical optical elements require high processing accuracy and are expensive, so this system still has many shortcomings.

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