Laser micro processor optical focus system

An optical focusing and laser technology, applied in optics, optical components, laser welding equipment, etc., can solve the problems of high price, high processing precision, poor processing adaptability, etc., and achieve the effect of strong adaptability and large dynamic range

Inactive Publication Date: 2008-03-26
JIANGSU UNIV
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Problems solved by technology

Herman et al. proposed to use a rotating prism to generate a non-diffraction beam, which has a simple structure, high energy utilization rate, and high energy conversion efficiency. The parameters of the non-diffraction beam generated by the rotating prism are determined, and the size of the focused spot is also determined, so the processing adaptability is poor. At the same time, due to the existence of errors, the spot of the

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  • Laser micro processor optical focus system

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[0014] The details and working conditions of the design method proposed by the present invention will be described in detail below with reference to FIG. 1 .

[0015] The present invention includes a laser 1, a Galileo telescope 2, a positive rotating prism 3, a first spherical lens 4 and a second spherical lens 6. After the laser output beam generated by the laser 1 is expanded and collimated by the Galileo telescope 2, it is rotated positively. After the transformation of the prism 3, a group of conical wave vector plane waves diverged at the angle θ are generated. The focal plane coincides with the focal plane on the object side of the second spherical lens 6, and the thin ring is transformed by the lens 6 to generate a set of cone wave vectors with an included angle θ' to the Z axis. The convergence area is Z, and within the convergence area is an undiffracted beam.

[0016] Considering the misalignment sensitivity of the first spherical lens 4, the farther the light beam...

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Abstract

The present invention relates to machine building technology and laser micro machining technology, and is especially one kind of laser focusing system for laser micro processing machine. The laser focusing system has small focused laser spot with the size unchanged with the distance and high workpiece location insensitivity. The laser focusing system includes one regular rotating prism, one first spherical lens in the distance to the regular rotating prism determined based on the power of the laser, and one second spherical lens confocal with the first one. Adopting different spherical lenses as the second spherical lens can obtain no-diffraction laser beam of different spot sizes for different processing purposes.

Description

technical field [0001] The invention relates to the fields of mechanical manufacturing and laser micromachining, in particular to an optical focusing system of a laser micromachining machine, which is particularly suitable for the requirement that the focusing spot is small, the size of the focusing spot does not change with the distance, and the sensitivity to the workpiece position error is Zero, and no need to consider the parfocal problem in the processing. Background technique [0002] Laser processing is one of the main directions of laser applications. Due to the small heat-affected zone of laser processing, good beam directionality, and the ability to focus the light spot to the wavelength level, the processing range and depth can be accurately controlled, with high repeatability and reliability. Good edge, selective processing, precision processing, so it is the most competitive alternative in machining. Laser processing is an application of comprehensive technolog...

Claims

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Application Information

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IPC IPC(8): B23K26/04B23K26/06B23K26/073G02B27/00B23K26/046
Inventor 姚红兵张永康叶霞鲁金忠李国杰
Owner JIANGSU UNIV
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