Crystal production method using supercritical solvent, crystal growth apparatus, crystal, and device
A manufacturing method and supercritical technology, which are applied in the directions of single crystal growth, single crystal growth, crystal growth, etc., can solve the problems of low growth crystal yield, high cost, easy heat escape, etc., and achieve the purpose of suppressing the usage amount and simplifying the structure. , the effect of reducing costs
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Embodiment 1
[0163] Polycrystalline h-GaN (hexagonal gallium nitride) was used as a raw material, ammonia was used as a solvent, and helium gas was used as a substance (X), added to the autoclave, and crystal growth of gallium nitride was carried out by the following method. In addition, the critical densities of ammonia and helium are 0.234 g cm -3 , 0.0693g cm -3 , the density difference is 70.4%.
[0164] He added to the autoclave using the addition apparatus shown in FIG. 3 , and was implemented using the crystal production apparatus shown in FIG. 1 .
[0165] In an autoclave made of Inconel 625 (approximately 40 ml, cross-sectional area 2 cm 2 ) having a catheter with an inner volume of 2 ml lined with platinum (about 3% of the upper part including the lid, gasket, etc. is not lined with platinum). , 1.0g of polycrystalline h-GaN (hexagonal gallium nitride) was added as a raw material, and 0.2g of fully dried NH was added as a mineralizer. 4 Cl, then set the baffle plate and the cr...
Embodiment 2
[0169] Using polycrystalline h-GaN (hexagonal gallium nitride) and metal Ga as raw materials, and using ammonia as a solvent, crystal growth of gallium nitride was carried out by the following method. In addition, during crystal growth, the raw material metal Ga reacts with ammonia to generate hydrogen gas in the autoclave. The critical densities of ammonia and hydrogen are 0.234 g cm -3 , 0.03102g cm -3 , the density difference is 86.7%.
[0170] An autoclave made of Inconel 625 was used in the same autoclave as in Example 1, which had a catheter with an inner volume of 2 ml and was lined with platinum (about 3% of the upper part including the lid, gasket, etc. was not lined with platinum). Kettle (about 40ml, cross-sectional area 2cm 2 ), 1.0 g of raw polycrystalline h-GaN (hexagonal gallium nitride) and 1.0 g of metallic Ga were added, and 0.4 g of fully dried NH was added as a mineralizer. 4 After Cl, a baffle plate and a crystal growth part such as a seed crystal were...
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