Method for preparing trichlorosilane and polycrystalline silicon by transforming silicon tetrachloride
A silicon tetrachloride and polycrystalline silicon technology, applied in the direction of halogenated silicon compounds, halogenated silanes, etc., can solve the problems of small equipment investment, low primary conversion rate, low energy consumption, etc., and achieve improved primary conversion rate, good economic benefits and The effect of social benefit
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[0027] Example: Using silicon tetrachloride as raw material, mainly producing SiHCl 3 , Co-production of polysilicon, equipment system and production method of by-product HCl.
[0028] figure 1 The device system for implementing the method of the present invention is given. The device system is mainly composed of a plasma generator 2, a plasma power supply 1 that provides electrical energy for the plasma generator, a reactor 5 vertically arranged below the plasma generator 2, and a gas buffer vertically arranged below the reactor 5. The container 6, the waste heat exchanger 7 connected to the gas buffer container 6, the condenser 8 connected to the gas outlet pipe of the waste heat exchanger 7, the fractionating tower 9 connected to the condensed liquid outlet of the condenser 8, and the condenser 8 gas The tail gas separation system 12 connected to the outlet is used to separate and store hydrogen, argon and hydrogen chloride gas, and is connected to the trichlorosilane and sil...
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